Development of scanning TRAXS and its application to studies of surface dynamics

（1）我们已经开发了一个与UHV-SEM-SREM设备组合的扫描TRAXS，它使我们能够对表面微观区域的表面化学成分和结构进行模拟分析。（2）我们已经研究了用这个新装置的电迁移现象。一个Ag的电影补丁被放置在Au覆盖的Si（111）表面上，然后直接电流通过晶体受到压力。“Ag补丁的扩散性和迁移速度是通过敏感地依赖于Au覆盖面和相应表面超级结构的。结果对迁移潜力的术语进行了分析，如表面合金相位形成和阶梯边缘屏障。（3）通过使用两个尺寸表面元素映射的能力，我们用一个覆盖硅（111）表面的样本表面调查了扫描轨道的检测敏感性。结果显示，对于探测单体Ag来说，具有足够的敏感性。（4） We have studied various surface phases induced by small amounts of Au adsorption on Si（111）-イD83エD8 XイD83エD8-Ag surface by using the scanning-TRAXS-SEM-SREM method。

(1) We have developed a scanning TRAXS combined with UHV-SEM-SREM apparatus, which enables simultaneous analyses of surface chemical compositions and structures of a microscopic region on surfaces.(2) We have studied electromigration phenomena with this new apparatus. A film patch of Ag was deposited on Au-precovered Si(111) surfaces, and then direct current was stressed through the crystals. The spreading ability and migration velocity of the Ag patch were round to sensitively depend on the Au coverages and corresponding surface superstructures. The results are analyzed in terms if surface alloy phase formation and step-edge barriers in migration potential.(3) By using an ability of two-dimensional mapping of surface elements, we have investigated a detection sensitivity of the scanning TRAXS with a sample surface of Ag-covered Si(111) surfaces. The results showed a high sensitivity enough for detecting monolayer Ag.(4) We have studied various surface phases induced by small amounts of Au adsorption on Si(111)-ィイD83ィエD8 X ィイD83ィエD8-Ag surface by using the scanning-TRAXS-SEM-SREM method.