Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators

智能纳米加工和测量系统,配备集成了压电传感器和执行器的金刚石探针阵列

基本信息

  • 批准号:
    10555075
  • 负责人:
  • 金额:
    $ 7.55万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
  • 财政年份:
    1998
  • 资助国家:
    日本
  • 起止时间:
    1998 至 1999
  • 项目状态:
    已结题

项目摘要

We have been developing a smart nano-machining and measurement system with a diamond probe array integrated with piezoelectric sensors and actuators.In order to realize this system, first, we have developed a variety of micromachining techniques of diamond thin films. These include the patterning of diamond thin films, sacrificial layer etching for the fabrication of movable microstructures being released from a substrate, a mold technique for the fabrication of three-dimensional microstructures, and bonding for assembly and packaging.Next, using a semiconductive diamond tip fabricated by the mold technique, we have developed an ultraprecision machining system with an in situ STM function. The results obtained showed that this newly developed semiconductive diamond tip was effective both as a machining tool and an STM tip.Then, we have developed a batch fabrication process for diamond AFM probes. This process includes our newly developed technique for the anodic bonding of a glass back … More ing plate to a diamond base, to which diamond probes have been attached, to facilitate handling. The diamond probes having been fabricated selective deposition for patterning a diamond cantilever and a Si mold technique for producing a sharp diamond tip. The fabricated diamond probes were optimally designed for contact mode AFM measurements by FEA simulations, and consisted of two kinds of V-shaped cantilever with spring constants of approximately 1 N/m and 5 N/m. These diamond probes proved capable of measuring AFM images.Finally, in order to realize the piezoelectric sensors and actuators, we have studied the optimum sputtering conditions of piezoelectric thin films such as ZnO and PZT, giving the piezoelectric constants d31 of around 3 and 90 pC/N, respectively. The values were measured using our newly developed measurement method for the piezoelectric constant d31 of thin film, based on the free vibration theory of cantilever beams. We have also developed the patterning techniques of the piezoelectric thin films. Less
本论文主要研究了金刚石薄膜的微加工技术,并将金刚石探针阵列与压电传感器和驱动器集成在一起,开发了一种智能纳米加工与测量系统。这些技术包括金刚石薄膜的图案化、用于制造从衬底上释放的可移动微结构的牺牲层蚀刻、用于制造三维微结构的模具技术以及用于组装和封装的键合技术。接下来,利用模具技术制造的金刚石探针,我们开发了具有原位STM功能的超精密加工系统。结果表明,这种新开发的金刚石针尖是有效的加工工具和STM针尖。然后,我们已经开发了一种批量制造工艺的金刚石AFM探针。这个过程包括我们新开发的玻璃背面阳极键合技术 ...更多信息 将板安装到金刚石底座上,金刚石探针已连接到该底座上,以便于操作。金刚石探针的制作采用了选择性沉积法制作金刚石悬臂梁和硅模技术制作尖锐的金刚石针尖。通过有限元模拟优化设计了用于接触式AFM测量的金刚石探针,探针由两种弹簧常数分别为1 N/m和5 N/m的V形悬臂梁组成。最后,为了实现压电传感器和驱动器,我们研究了ZnO和PZT等压电薄膜的最佳溅射条件,得到压电常数d31分别为3和90 pC/N左右。利用我们新开发的基于悬臂梁自由振动理论的薄膜压电常数d31的测量方法测量了这些值。我们也发展了压电薄膜的图案化技术。少

项目成果

期刊论文数量(3)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
柴田隆行: "ダイヤモンド薄膜のマイクロマシニング"表面技術. 50・11. 961-967 (1999)
Takayuki Shibata:“金刚石薄膜的微机械加工”50・11(1999)。
  • DOI:
  • 发表时间:
  • 期刊:
  • 影响因子:
    0
  • 作者:
  • 通讯作者:
T. Shibata: "Micromachining of Diamond Thin Films (in Japanese)"J. Surface Finishing Soc. Japan. 50,11. 961-967 (1999)
T. Shibata:“金刚石薄膜的微加工(日语)”J。
  • DOI:
  • 发表时间:
  • 期刊:
  • 影响因子:
    0
  • 作者:
  • 通讯作者:
{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ monograph.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ sciAawards.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ conferencePapers.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ patent.updateTime }}

SHIBATA Takayuki其他文献

電子プローブマイクロアナライザー(EPMA)を用いた新生代のCHIME年代測定の要素技術:不感時間補正
使用电子探针微量分析仪(EPMA)进行新生代CHIME测年的基本技术:死区时间校正
  • DOI:
  • 发表时间:
    2020
  • 期刊:
  • 影响因子:
    0
  • 作者:
    TANIZAKI Kohei;SANTRA Tuhin Subhra;SHIBATA Takayuki;NAGAI Moeto;加藤丈典・陳美呈
  • 通讯作者:
    加藤丈典・陳美呈
Numerical analysis of cell membrane perforation in on-chip microdroplet-based electroporation (Membrane perforation characteristics when electrodes are placed on the same plane)
片上微滴电穿孔细胞膜穿孔的数值分析(电极置于同一平面时的膜穿孔特性)
  • DOI:
    10.1299/transjsme.20-00446
  • 发表时间:
    2021
  • 期刊:
  • 影响因子:
    0
  • 作者:
    NAKASHIMA Kenji;MATSUYAMA Fuminori;JOHNO Yuuki;ISHII-TESHIMA Miho;SHIBATA Takayuki
  • 通讯作者:
    SHIBATA Takayuki

SHIBATA Takayuki的其他文献

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

{{ truncateString('SHIBATA Takayuki', 18)}}的其他基金

Development of Visualization Technique of Nanofabrication Processing with Photocatalytic AFM Probes
光催化AFM探针纳米加工可视化技术的发展
  • 批准号:
    18K18805
  • 财政年份:
    2018
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Challenging Research (Exploratory)
Development of early detection method for Chronic Obstructive Pulmonary Disease
慢性阻塞性肺疾病早期检测方法的开发
  • 批准号:
    15K07892
  • 财政年份:
    2015
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Development of High-Quality and High-Throughput Micro-HoleProcessing Using Hollow Microneedle Array
利用空心微针阵列开发高质量和高通量的微孔加工
  • 批准号:
    23656103
  • 财政年份:
    2011
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
Development of a novel fluorescence derivatization method for the screening of the risk of side effects caused by anticancer drugs
开发新型荧光衍生化方法用于筛查抗癌药物副作用风险
  • 批准号:
    23790051
  • 财政年份:
    2011
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Young Scientists (B)
Whether the self-government state is contradictory. Study on theory of self-government by Lorenz von Stein
自治国家是否矛盾。
  • 批准号:
    22520079
  • 财政年份:
    2010
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Development of On-Chip Cell Manipulation System Capable of Massively Parallel Patterning of Single Cells
开发能够大规模并行单细胞图案化的片上细胞操纵系统
  • 批准号:
    20300156
  • 财政年份:
    2008
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of Bioprobe Integrated with Microneedle for Cellular Function Analysis
开发与微针集成的生物探针用于细胞功能分析
  • 批准号:
    18300150
  • 财政年份:
    2006
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of Cell Surgery System on a Chip with Nanoneedle Array
纳米针阵列芯片上细胞手术系统的开发
  • 批准号:
    16300147
  • 财政年份:
    2004
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators
智能纳米加工和测量系统,配备集成了压电传感器和执行器的金刚石探针阵列
  • 批准号:
    13555068
  • 财政年份:
    2001
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Can Ludwig Feuerbach reconstruct the History of Philosophy?
路德维希·费尔巴哈能否重构哲学史?
  • 批准号:
    13610015
  • 财政年份:
    2001
  • 资助金额:
    $ 7.55万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
{{ showInfoDetail.title }}

作者:{{ showInfoDetail.author }}

知道了