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Development of an Infrared Thomson Scattering System for Diagnostics of Processing Plasmas

开发用于诊断处理等离子体的红外汤姆逊散射系统

基本信息

批准号：
10680462
负责人：
UCHINO Kiichiro
金额：
$ 1.92万
依托单位：
KYUSHU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10680462/
关键词：
Processing Plasma Laser diagnostics Thomson scattering Infrared light Electron density Electron temperature Reactive gases Photon energy

项目摘要

When laser Thomson scattering is applied to discharges using reactive gases, there is a strong possibility that the laser pulse may perturb the discharges. Most of the reactions that a laser might induce, such as photo-detachment of electrons from negative ions and photo-dissociation of molecules, have a photon energy threshold. This project aimed to develop a new Thomson scattering system based on an infrared (low photon energy) laser for diagnostics of reactive plasmas and to examine conditions that the laser pulse disturbs the discharges. Also, the improvement of the lower detection limit for electron density was performed. Following results were obtained.(1) A Thomson scattering measurement system based on a 1.064 μm wavelength YAG laser was constructed. Scattering measurements showed that the results were comparable with those obtained using previous Thomson scattering systems that used visible lasers.(2) No evidence of laser perturbation was observed of ICP discharges using CFィイD24ィエD2 gas. However, the laser perturbation was observed at a wavelength 532 nm for a microwave discharge plasma produced in CHィイD24ィエD2 gas at a pressure of 20 Torr. These phenomena should be investigated in detail hereafter.(3) The lower detection limit of electron density was improved down to 5x10ィイD115 ィエD1 mィイD1-3ィエD1. This was achieved mainly by maximizing the detection solid angle, increasing shot numbers for data accumulation, and using a monochromator which has a specific characteristic of high stray light rejection.

当激光汤姆逊散射应用于使用反应气体的放电时，激光脉冲很可能会扰乱放电。激光可能引发的大多数反应，如电子与负离子的光分离和分子的光解离，都有一个光子能量阈值。本项目旨在开发一种新的基于红外(低光子能量)激光的汤姆逊散射系统，用于诊断反应等离子体，并研究激光脉冲对放电的干扰条件。并对电子密度的检测下限进行了改进。(1)搭建了一套基于1.064μm波长激光的汤姆逊散射测量系统。散射测量表明，结果与以前使用可见激光的汤姆逊散射系统得到的结果相当。(2)没有观察到使用CFィイD24ィエD2气体的激光微扰等离子体放电的证据。然而，在20Torr压力下，在CHィイD24ィエD2气体中产生的微波放电等离子体在5 32 nm处观察到了激光微扰。将电子密度的检测下限提高到5×10ィイD115ィエD_1 mィイD_1-3ィエD_1。这主要是通过最大化探测立体角，增加用于数据积累的激发数，以及使用具有高杂光抑制特性的单色仪来实现的。