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Toughening of chemically-vapor deposited diamond by means of active incorporation of carbon allotropes

Toughening of chemically-vapor deposited diamond by means of active incorporation of carbon allotropes
通过主动掺入碳同素异形体来增韧化学气相沉积金刚石
批准号:
11650075
负责人:
KAMIYA Shoji
金额:
$2.37万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (C)
财政年份:
1999
资助国家:
日本
项目状态:
已结题
起止时间:
1999 至 2000

项目摘要

项目成果

KAMIYA Shoji的其他基金

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中文摘要
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英文摘要
This research project aimed at toughening of chemically-vapor deposited (CVD) diamond by means of actively incorporating carbon allotropes besides diamond. We studied the following two points and have succeeded to develop CVD diamond with adhesive toughness more than twice as much as that of usual one.Elucidation and control for the toughening mechanism by means of the incorporation of non-diamond carbon allotropes The relations between deposition condition and crystalline structure, and between crystalline structure and strength were examined for the case of CVD diamond deposited under various conditions. As a result, it is for the first time clarified that non-diamond carbon concentrates on the grain boundaries which results in weaker strength of grain boundaries than that of grains, and that selective fracture of grain boundary dissipates the energy which leads to a higher adhesive toughness for the case of the adequate grain size. On the contrary, it was confirmed that toughness of CVD diamond films monotonically decreases with respect to the increase of non-diamond carbon with finer grain size.Realization of thin films with higher toughness by means of structure control Application of bias voltage to the substrates, which is an effective method to control the state of crystalline nuclei on the interface of CVD diamond and substrates, was studied. Together with the knowledge on the effect of deposition condition mentioned above, we examined the possibility to optimize the condition to obtain higher toughness. As a consequence, we succeeded to obtain a CVD diamond coating on tungsten carbide cutting tools with the adhesive toughness of 30 J/m^2 which is more than two times of the conventional one being currently used in industry.
期刊论文(35)
专著(0)
科研奖励(0)
会议论文
神谷庄司(井上昭徳,坂真澄,阿部博之): "気相合成法による炭素原子堆積に伴うシリコン基板表面の残留応力に対する分子動力学的考察"日本機械学会第12回計算力学講演会講演論文集. 99-5. 25-26 (1999)
Shoji Kamiya(Akinori Inoue、Masumi Saka、Hiroyuki Abe):《分子动力学考虑由于气相合成碳原子沉积而导致硅基板表面残余应力》第12届日本机械工程学会计算力学会议论文集。 99-5。25-26(1999)
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通讯作者:
N.Umehara (K.Kato, M.Bai and Y.Miyake): "Effect of internal stress on CNx coating on its wear in sliding friction"Surface and Coating Technology. Vol.113. 233-241 (1999)
N.Umehara(K.Kato、M.Bai 和 Y.Miyake):“CNx 涂层上的内应力对其滑动摩擦磨损的影响”表面和涂层技术。
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通讯作者:
S.Kamiya (A.Inoue, M.Saka and H.Abe): "A molecular dynamics study of residual stress due to chemical vapor deposition of carbon on silicon substrate surface"Proceedings of the 12th computational mechanics conference JSME. vol.99-5. 25-26 (1999)
S.Kamiya(A.Inoue、M.Saka 和 H.Abe):“硅基板表面碳化学气相沉积引起的残余应力的分子动力学研究”第 12 届计算力学会议 JSME 论文集。
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通讯作者:
K.Kato (H.Koide and N.Umehara): "Microwear properties of carbon nitride coatings"Wear. Vol.238. 40-44 (2000)
K.Kato(H.Koide 和 N.Umehara):“氮化碳涂层的微磨损特性”磨损。
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通讯作者:
32
    Mechanical fatigue test under liquid water toward bio-implantable MEMS structures with infinite lifetime
    • 批准号:
      23651137
    • 项目类别:
      Grant-in-Aid for Challenging Exploratory Research
    • 资助金额:
      $2.58万
    • 财政年份:
      2011
    • 负责人:
      KAMIYA Shoji
    • 依托单位:
    In-situ TEM observation of silicon fatigue process using resonance compressive fatigue test
    • 批准号:
      23360054
    • 项目类别:
      Grant-in-Aid for Scientific Research (B)
    • 资助金额:
      $11.9万
    • 财政年份:
      2011
    • 负责人:
      KAMIYA Shoji
    • 依托单位:
    Establishment of an reliability evaluation scheme based on statistical analysis and electronic defect sensing for the reliability of silicon against fatigue failure
    • 批准号:
      20360052
    • 项目类别:
      Grant-in-Aid for Scientific Research (B)
    • 资助金额:
      $12.4万
    • 财政年份:
      2008
    • 负责人:
      KAMIYA Shoji
    • 依托单位:
    Establishment of a new method of evaluation for the adhesive strength of thin films by micro-indentation wit two degrees of freedom
    • 批准号:
      10555024
    • 项目类别:
      Grant-in-Aid for Scientific Research (B)
    • 资助金额:
      $3.71万
    • 财政年份:
      1998
    • 负责人:
      KAMIYA Shoji
    • 依托单位: