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Establishment of a new method of evaluation for the adhesive strength of thin films by micro-indentation wit two degrees of freedom

Establishment of a new method of evaluation for the adhesive strength of thin films by micro-indentation wit two degrees of freedom
二自由度微压痕评价薄膜粘合强度新方法的建立
批准号:
10555024
负责人:
KAMIYA Shoji
金额:
$3.71万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
1998
资助国家:
日本
项目状态:
已结题
起止时间:
1998 至 1999

项目摘要

项目成果

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中文摘要
翻译
This research project aims at the establishment of a new method of evaluation for the adhesive strength of thin films by micro-indentation with two degrees of freedom.We studied the following three points and have succeeded to developed a method which can be generally applicable to various combinations of films and substrates.Trial production of two-freedom indentorA micro-indentation set-up with two degrees of freedom was developed。This is equipped with an optical microscope which enables real-time observation of crack extension behavior for the measurement of interface crack length.Selection of the optimum loading path and shape of indentorVarious loading,configurations were examined by using the indentor developed above。As a conclusion,specimens should be prepared where the film is projected a little out of the cross section of the substrate。This projection is pushed upwards from the interface side by a conical stylus of diamond,which we found the best way to efficiently extend an interface crack.Evaluation of toughness by the computational simulationComputational simulations were carried out according to the loading configuration above。By comparing the crack extension resistance curves obtained by both experiment and simulation,we succeeded to evaluate the toughness of interface。As an example,the toughness of interface between a WC-Co substrate and the diamond film prepared as a wear protection coating was determined to be about14J/m I D 12 I D 1.Although adhesion of wear protection coating is one of the critical problems,this is the first quantitative data ever obtained all over the world for the adhesive strength of diamond coatings on WC-Co cutting tools.This fact proves that our new method is quite a successful one with a significant advantage for industries.
英文摘要
This research project aims at the establishment of a new method of evaluation for the adhesive strength of thin films by micro-indentation with two degrees of freedom. We studied the following three points and have succeeded to developed a method which can be generally applicable to various combinations of films and substrates.Trial production of two-freedom indentorA micro-indentation set-up with two degrees of freedom was developed. This is equipped with an optical microscope which enables real-time observation of crack extension behavior for the measurement of interface crack length.Selection of the optimum loading path and shape of indentorVarious loading, configurations were examined by using the indentor developed above. As a conclusion, specimens should be prepared where the film is projected a little out of the cross section of the substrate. This projection is pushed upwards from the interface side by a conical stylus of diamond, which we found the best way to efficiently extend an interface crack.Evaluation of toughness by the computational simulationComputational simulations were carried out according to the loading configuration above. By comparing the crack extension resistance curves obtained by both experiment and simulation, we succeeded to evaluate the toughness of interface. As an example, the toughness of interface between a WC-Co substrate and the diamond film prepared as a wear protection coating was determined to be about 14 J/mィイD12ィエD1. Although adhesion of wear protection coating is one of the critical problems, this is the first quantitative data ever obtained all over the world for the adhesive strength of diamond coatings on WC-Co cutting tools. This fact proves that our new method is quite a successful one with a significant advantage for industries.
期刊论文(18)
专著(0)
科研奖励(0)
会议论文
K.Sasagawa(M.Hasegawa,M.Saka and H.Abe): "Experimental verification of prediction method for electromigration failure of polycrystalline lines"Journal of Applied Physics. (印刷中). (2000)
K.笹川(M.Hasekawa、M.Saka 和 H.Abe):“多晶硅线电迁移失效预测方法的实验验证”应用物理学杂志(2000 年出版)。
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通讯作者:
N. Umehara (K. Kato, M. Bai and Y. Miyake): "Effect of internal stress of CNx coating on its wear in sliding friction"Surface and Coating Technology. Vol. 113. 233-241 (1999)
N. Umehara(K. Kato、M. Bai 和 Y. Miyake):“CNx 涂层内应力对其滑动摩擦磨损的影响”表面与涂层技术。
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通讯作者:
S. Kamiya (H. Takahashi, M. Saka and H. Abe): "Evaluation and improvement of the adhesive fracture toughness of CVD diamond on silicon substrate"Advances in Electronic Packaging, D. Agonafer et al.. EEP-Vol.26-1. 763-767 (1999)
S. Kamiya(H. Takahashi、M. Saka 和 H. Abe):“硅基板上 CVD 金刚石粘合断裂韧性的评估和改进”Advances in Electronic Packaging,D. Agonafer 等人。EEP-Vol.26
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神谷庄司(高橋博紀、坂真澄、阿部博之): "気相合成ダイヤモンドの結晶構造とその界面破壊じん性に及ぽす影響"日本機械学会1999年度年次大会講演論文集. 99・1. 3-4 (1999)
Shoji Kamiya(Hiroki Takahashi、Masumi Saka、Hiroyuki Abe):“气相合成金刚石的晶体结构及其对界面断裂韧性的影响”日本机械工程学会 1999 年年会记录 99, 1. 3 -。 4(1999)
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14
    Mechanical fatigue test under liquid water toward bio-implantable MEMS structures with infinite lifetime
    • 批准号:
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    • 财政年份:
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    • 财政年份:
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    • 依托单位:
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    • 批准号:
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      Grant-in-Aid for Scientific Research (B)
    • 资助金额:
      $12.4万
    • 财政年份:
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    • 负责人:
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    • 依托单位:
    Toughening of chemically-vapor deposited diamond by means of active incorporation of carbon allotropes
    • 批准号:
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    • 项目类别:
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