Micro Mold Machining by Micro Robot with Hopping Tool and Micro Thermal Heater

本研究设计了由压电元件和电磁铁组成的微型机器人，并在微型机器人上安装了专用的微跳刀，以提供精确间距的微压痕。在初步实验的基础上，通过几个独特的结果验证了微机器人系统进行微建模过程的可行性。2001年，对以下问题进行了研究：(1)金刚石压头微跳刀的设计与制造：为避免额外的执行机构，微机器人的步进运动可以激励由简单悬臂机构支撑的微跳刀。(2)在微机器人上的实现与实验。在微机器人上实现了谐振微跳刀，用0.5微半径的金刚石压头对表面进行了微加工。实验结果表明，直径为1微米的微倾角以4微米的间距成功压痕。2002年，为检查微型机器人微成型的可能性而考虑的问题；(1)熔金属喷射：将线圈加热器加热后的焊料通过电磁惯性喷射器喷射到靶上，即可粘贴微熔金属。然后，另一个带有微型加热器的小型机器人可以将金属镀层焊接到表面。(2)二维微槽加工：跳跃机器人通过控制间距变窄来制造小槽，然后在另一个垂直运动的小机器人设定的目标上刻划出精确的槽。这两个小型机器人的组合可以实现深度为0.2微米的二维微槽。

In this research, micro robot which is composed of piezo elements and electromagntes is designed and the special micro hopping tool is implemented onto the small robot to provide micro indentation with the accurate spacing. Ad s the results of the primary experiements, the feasibility of micro modling process performed by the micro robot system is confirmed with the seceral unique results. In 2001, the mentioned below issues were investigated,(1) Design and fabrication of micro hopping tool with diamond indentor :For avoiding the additional actuator, the hopping tool which is supported by the simple cantilever mechanism can be excited by the stepping motion of the micro robot.(2) Implementation to the micro robot and experiementThe resonating micro hopping tool was implemented on to the micro robot and the micro machining were carried out on the surface with a diamond indentor of 0.5 micro radius tip. As a results of the experiment, the micro dip of 1 micron diameter were successfully indented with the spacing of 4 micro.In 2002, the issues were considered for checking the possibility of micro molding by micro robots ;(1) Melted metal injection :The solder which was heated up by the coil heater is injected to the target by the solenoid inertia injector and the micro melted metal can be pasted. Then another small robot with the micro heater can weld the metal dip to the surface.(2) 2 dimentional micro groove machining :The hopping robot can make the small groove by controlling the spacing to be narrow and then the precise groove can be feagured out on the target which is set on the other small robot moving perpendicularly. This two small robots combination can allow the 2D micro grooving with the depth of 0.2 micron.