Micro Mold Machining by Micro Robot with Hopping Tool and Micro Thermal Heater

本研究设计了由压电元件和电磁铁组成的微型机器人，并在小型机器人上安装了专用的微动跳跃工具，以提供具有精确间距的微压痕。S的初步实验结果证实了微机器人系统进行微建模过程的可行性，并得到了一些独特的结果。本文主要研究了以下几个方面的问题：(1)带金刚石压头的微型跳跃工具的设计与制造：为了避免增加额外的驱动器，可以利用微机器人的步进运动来激励由简单悬臂式机构支撑的跳跃工具。(2)微型机器人的实现及实验研究在微型机器人上实现了谐振式微型跳跃工具，并利用0.5微米半径的金刚石压头在表面上进行了微加工。实验的结果是，成功地以4微米的间距压入了直径为1微米的微浸渍。2002年，为了检验微型机器人进行微成型的可能性，考虑了以下问题：(1)熔融金属注射：通过线圈加热器加热的焊料通过螺线管惯性注射器注入靶材，可以粘贴微小熔化的金属。二维微坡口加工：跳跃机器人通过控制间距变窄，在另一台垂直移动的小型机器人的靶材上加工出精确的坡口。这两个小型机器人的组合可以实现深度为0.2微米的2D微沟槽。

In this research, micro robot which is composed of piezo elements and electromagntes is designed and the special micro hopping tool is implemented onto the small robot to provide micro indentation with the accurate spacing. Ad s the results of the primary experiements, the feasibility of micro modling process performed by the micro robot system is confirmed with the seceral unique results. In 2001, the mentioned below issues were investigated,(1) Design and fabrication of micro hopping tool with diamond indentor :For avoiding the additional actuator, the hopping tool which is supported by the simple cantilever mechanism can be excited by the stepping motion of the micro robot.(2) Implementation to the micro robot and experiementThe resonating micro hopping tool was implemented on to the micro robot and the micro machining were carried out on the surface with a diamond indentor of 0.5 micro radius tip. As a results of the experiment, the micro dip of 1 micron diameter were successfully indented with the spacing of 4 micro.In 2002, the issues were considered for checking the possibility of micro molding by micro robots ;(1) Melted metal injection :The solder which was heated up by the coil heater is injected to the target by the solenoid inertia injector and the micro melted metal can be pasted. Then another small robot with the micro heater can weld the metal dip to the surface.(2) 2 dimentional micro groove machining :The hopping robot can make the small groove by controlling the spacing to be narrow and then the precise groove can be feagured out on the target which is set on the other small robot moving perpendicularly. This two small robots combination can allow the 2D micro grooving with the depth of 0.2 micron.