Development of Microfabrication and Measurement System by Multiple Miniature Robots with Micro Tools in High Vacuum Chamber

高真空室内多微型机器人微工具微加工及测量系统的研制

• 批准号: 06555035
• 负责人: AOYAMA Hisayuki
• 金额: $ 6.34万
• 依托单位: SHIZUOKA UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555035/
• 关键词: Miniature Robot; High Vacuum; Surface Structure; Microfabrication; Measurement; 電子デバイス

-a. Scanning Probe Microscope Imprementation and Microfabrication (Sasaki and Hara)Several kinds of fine probe, tunneling current, atomic forow and near field, for scanning the surface of sample were developed and characteristics of those probes were investigated. Furthermore the pulse discharge from micro probe was applied to the sample to make the microscopic machining which should be useful for micro devices production.-b. Miniature Robot for ultra high vacuum chamber (Aoyama and Sasaki)Convensional miniature mechanisms are designed for moving in the atmospher condition. However it must be reconsidered to work in vacuum condition. Then the mechanical elements, joint components and electrical wiring should be improved so much. Finally the new miniature robot which can move even in high vacuum condition of 10^5 Torr was assembled successfully to control the microfabrication process.-c. Microscopic behavior of semiconductor material surface in high vacuum condition (Murakami)Surface condition of several metal and ceramics were investigated to the level of atoic size in ultra high vacuum condition. Interference between the sample and the probe in-situ contact were characterized. And the miniature robot with a micro discharge probe could be made for microfabrication in high vacuum condition.

-a.扫描探针显微镜（Sasaki和Hara）研制了几种用于扫描样品表面的精细探针，即隧道电流探针、原子前向场探针和近场探针，并对这些探针的特性进行了研究。此外，还利用微探针的脉冲放电对样品进行了微细加工，这对微器件的生产具有一定的指导意义。B.超高真空室用微型机器人（Aoyama和Sasaki）传统的微型机构是为在大气条件下移动而设计的。然而，必须重新考虑在真空条件下工作。那么机械元件、连接部件和电气布线就应该改进这么多。最后，成功地组装了即使在10^5 Torr的高真空条件下也能移动的新型微型机器人，以控制微加工过程。C.高真空条件下半导体材料表面的微观行为研究了几种金属和陶瓷在超高真空条件下的表面状态，达到原子尺度。样品和探针原位接触之间的干扰进行了表征。该微型机器人可用于高真空条件下的微细加工。

项目成果

Hisayuki Aoyama, Hidemi Sone, Futoshi Iwata and Akira Sasaki: "Combination od Miniature Robot and Coordinate Measuring Machine" Proc. of 2nd Int. Conf. on Prec. Engg.Vol.1. 465-468 (1995)

Hisayuki Aoyama、Hidemi Sone、Futoshi Iwata 和 Akira Sasaki：“微型机器人与坐标测量机的组合”Proc.

Hisayuki Aoyama: "Desktop Flexible Manufacturing System by Miniature Robots" Proc.of IEEE Robotics and Automation. 2. 660-665 (1995)

Hisayuki Aoyama：“微型机器人桌面柔性制造系统”Proc.of IEEE 机器人与自动化。

Kenji Murakami: "Micro Stroctured and Compositional Analyses on Grain Boundary of Low-Temperature Sintered Pb(2r,Ti)O_3 Ceramics" Ceramics Transactions. 41. 161-168 (1994)

Kenji Murakami：“低温烧结 Pb(2r,Ti)O_3 陶瓷晶界的微观结构和成分分析”陶瓷交易。

Kenji Murakami: "Behavior of Morphotropic Phase Boundary in Low-Temperatune Sinkied Leod Zircoua to-Titanate Ceonniis with B:FeO_3 and Ba(CuO_5Wo_5)O^3" Jpn.J.Appl.Phys. 33. 5529-5532 (1994)

Kenji Murakami：“B:FeO_3 和 Ba(CuO_5Wo_5)O^3 的低温 Sinkied Leod Zircoa 到钛酸盐 Ceonniis 中的同形相边界行为”Jpn.J.Appl.Phys。

Akira Sasaki, Yujin Zheng, Hisayuki Aoyama: "High-Efficiency Bridge Double Phase-Conjugate Mirror in Cu-Dopped Crystal" Jpn. J.of Appl. Phys.Vol.34. 5405-5407 (1995)

Akira Sasaki、Yujin Cheng、Hisayuki Aoyama：“掺铜晶体中的高效桥双相共轭镜”Jpn。