Development of Micro Robot for Nano Operation into Bio Cell

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In this research, it is the final goal to develop the micro robot with nano positioning resolution for injecting such micro glass pipette into the bio cell in order to operate the material. In the next step, it will be considered that the micro flow of such protein in the bio cell can be monitored and the micro robot with micro probe can make the nano manipulation for micro chemical reaction.In this project, the results as mentioned below were achieved ;(1)Micro robot with nano manipulation :The newly developed micro robot is composed of the piezo and electro magnet for providing nano stepping motion. And the micro tool also can be controlled to the specified potision with the accuracy of nano level.And the bio cell can be converyed and rotated around the vibrated pipette alon the micro flow.(2)Micro thermal sensng by the micro pipette coated the metal.In order to measure the temperature at the local area of bio cell, the micro pipette that is coated by the special metal such Ni and Cu to generate the micro voltage.(3)Nano machining by SPMIt was succeeded that the special thin SPM probe was developed for making femt level of machining with the help of electrical field effect between the tip and the sample. As the results of experiment, it succeeded in providing nano metal on the small target tip.