Combination of nano imprint and local mechano-chemical machining by micro robot

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In this project, the newly developed micro machining that is combined with nano imprint and local chemical micro reaction was proposed and the performances were experimentally proved. The micro actuator for nano imprint was also developed and implemented onto the micro robor that was composed of the piezo elements and electromagnets so that it could move like an inchworm with the nano stepping resolution. And the unique dispenser that can provide pico-liter resolution was designed and fabricated so that it could make such micro chemical reaction and successfully generate the accurate micro double layers capsule.