BASIC RESEARCH ON INTEGRATION OF MICRO FABRICATION BASED ON MECHANICAL AND PHYSICAL PROCESS ASSISTED BY MINIATURE ROBOTS

1996年，研究了微型工具微型机器人的设计与开发。提出了金属微观机械去除和物理沉积相结合的微加工工艺。初步实验结果表明：①实现了样品和掩膜板的精确定位；(2)不同材料的金属颗粒可以被拾取并输送到熔炉中进行闪蒸沉积。(3)掺杂工艺可用于材料的热扩散。1997年，利用微型机器人的微跳刀在真空室中对SiO2溅射Si衬底的特殊样品进行了微压痕加工。并对半导体微器件的可能性进行了试验研究。

In 1996 the design and development of micro robots with micro tools were investigated. Micro fabrication process which is the combination of microscopit mechanical removal and physical deposition of metal were proposed.As the results of primary experiments, several performances were obtained as mentioned below,(1) Precise positioning for the sample and the mask plates was accomplished.(2) different materials of metal grains can be picked up and transported into the melting pot for flash-deposition.(3) Dopping process can be used for heat difusion of material.In 1997 the special samples of SiO2 sputtered Si substrate were machined by the micro hopping tool of the miniature robot for micro indentation in the vacuum chamber. And another trial experiment was also carried out for investigating the possibility of semiconductor micro devices.