BASIC RESEARCH ON INTEGRATION OF MICRO FABRICATION BASED ON MECHANICAL AND PHYSICAL PROCESS ASSISTED BY MINIATURE ROBOTS

微型机器人辅助的基于机械物理过程的微制造集成基础研究

• 批准号: 08650131
• 负责人: AOYAMA Hisayuki
• 金额: $ 1.28万
• 依托单位: UNIVERSITY OF ELECTRO-COMMUNICATIONS (1997)Shizuoka University (1996)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08650131/
• 关键词: Minoature Robot; Micro Fabrication; Deposition Control; Precision Positioning; 半導体材料; ミニロボット

In 1996 the design and development of micro robots with micro tools were investigated. Micro fabrication process which is the combination of microscopit mechanical removal and physical deposition of metal were proposed.As the results of primary experiments, several performances were obtained as mentioned below,(1) Precise positioning for the sample and the mask plates was accomplished.(2) different materials of metal grains can be picked up and transported into the melting pot for flash-deposition.(3) Dopping process can be used for heat difusion of material.In 1997 the special samples of SiO2 sputtered Si substrate were machined by the micro hopping tool of the miniature robot for micro indentation in the vacuum chamber. And another trial experiment was also carried out for investigating the possibility of semiconductor micro devices.

1996年，研究了微型工具微型机器人的设计与开发。提出了金属微观机械去除和物理沉积相结合的微加工工艺。初步实验结果表明：①实现了样品和掩膜板的精确定位；(2)不同材料的金属颗粒可以被拾取并输送到熔炉中进行闪蒸沉积。(3)掺杂工艺可用于材料的热扩散。1997年，利用微型机器人的微跳刀在真空室中对SiO2溅射Si衬底的特殊样品进行了微压痕加工。并对半导体微器件的可能性进行了试验研究。

项目成果

Hisayuki Aoyama, Futoshi Iwata and Akira Sasaki: "Miniature Robots for a Desktop Flexible Micro Manufacturing" IEEE Control System. Vol.16, No.2. 6-12 (1996)

Hisayuki Aoyama、Futoshi Iwata 和 Akira Sasaki：“用于桌面灵活微制造的微型机器人”IEEE 控制系统。

Hisayuki Aoyama: "Pursuit control of micro robot basalon magnetic footstep" Proc.of Int.Conp.on Micromechatronics for Inf.256-260 (1997)

Hisayuki Aoyama：“微型机器人basalon磁足迹的追踪控制”Proc.of Int.Conp.on Micromechatronics for Inf.256-260 (1997)

H.Aoyama: "Micro Indentation on Silicon Device by Miniature Robot" Proc.op 5th Bi-Nanotechnology Symp. 3-4 (1997)

H.Aoyama：“微型机器人在硅器件上的微压痕”Proc.op 第五届双纳米技术研讨会。

H.Aoyama: "Micro Device produced by Micro Robots" Proc.op 12th Annl.Meeting op A.S.P.E. 529-532 (1997)

H.Aoyama：“微型机器人生产的微型设备”Proc.op 12th Annl.Meeting op A.S.P.E.

Hisayuki Aoyama: "Miniature Robots for a Desktop Flexible Miqo Manufacturing" IEEE Control System. 16・2. 6-12 (1996)

Hisayuki Aoyama：“用于桌面灵活 Miqo 制造的微型机器人”IEEE 控制系统 16・2 (1996)。