Fabrication of highly oriented carbon-nanotube films and its application to an emitter with high efficiency
高取向碳纳米管薄膜的制备及其在高效发射器中的应用
基本信息
- 批准号:13650737
- 负责人:
- 金额:$ 1.98万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Scientific Research (C)
- 财政年份:2001
- 资助国家:日本
- 起止时间:2001 至 2002
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
In order to investigate the initial stage of carbon-nanotube(CNT) formation at the surface decomposition of SiC, we heated the SiC single-crystal substrates (6H-type, C-face polished) in vacuum using an infrared mirror furnace and a turbo-molecular pump, and we analyzed the structure change at the surfaces by means of spectro-ellipsometric measurements.Up to 1100℃, the change in spectra could be interpreted as the decrease of thickness of SiO_2 layer (〜4 nm) on the SiC substrate. At 1150℃ and above, however, spectra were distinctly different from those of the samples heated up to 1100℃, and could be interpreted with a three-phase model, in which the surface layer consists of graphite including X% of voids, where the surface layer thickness t = 10〜50 nm and X = 50〜70%. This indicates that the surface decomposition of SiC is initiated at this temperature and that the spectro-ellipsometric measurements can detect small changes of optical properties of surface due to the initiation of decomposition.When the substrates were heated for a longer time (80〜640 min) at 1300℃, the spectra were essentially different again, and they could be interpreted with a four-phase model, in which the surface layer consists of two graphite layers including different percentages of voids, where the thickness of surface layers t_1 = 20〜50 nm, t_2 = 20〜60 nm and the percentages of voids X = 〜90%, Y = 〜50%. This implied that formation of CNT would start at this temperature. This formation was also detected by FE-SEM observation.
为了研究碳化硅表面分解过程中碳纳米管形成的初始阶段,我们用红外镜面加热炉和涡轮分子泵真空加热了碳化硅单晶衬底(6H型,C面抛光),并用椭圆偏振光谱仪分析了表面结构的变化。在1100℃范围内,光谱的变化可以解释为碳化硅衬底上SiO_2层(~4 nm)厚度的减少。然而,在1150℃及以上,光谱与加热到1100℃的样品有明显的不同,可以用三相模型来解释,表面层由含有X%孔洞的石墨组成,表面层厚度t=10~50 nm,X=50~70%。当衬底在1300℃下加热较长时间(80~640min)时,光谱又发生了本质上的不同,可以用四相模型来解释,表面层由两层含不同比例空洞的石墨层组成,表面层厚度t1=20~50 nm,t2=20~60 nm,空洞百分比X=~90%,Y=~50%。这意味着碳纳米管的形成将在这个温度下开始。FE-SEM观察也发现了这一层状结构。
项目成果
期刊论文数量(3)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
K.Matsumoto: "Spectro-ellipsometric Characterization and Gaseous Occlusion of FullereneC_<60> Crystals"Fullerenes, Nanotubes, and Carbon Nanostructures. Vol.11, No.1. 15-13 (2003)
K.Matsumoto:“富勒烯 C_<60> 晶体的光谱椭偏表征和气体吸藏”富勒烯、纳米管和碳纳米结构。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
K.Matsumoto: "Spectro-ellipsometric Characterization and Gaseous Occlusion of Fullerene C_60 Crystals"Fullerenes, Nanotubes, and Carbon Nanostructures. 11. 15-23 (2003)
K.Matsumoto:“富勒烯 C_60 晶体的光谱椭圆表征和气体吸藏”富勒烯、纳米管和碳纳米结构。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
K.Matsumoto: "Spectro-ellipsometric Characterization and Gaseous Occlusion of Fullerene C_<60> Crystals"Fullerenes, Nanotubes, and Carbon Nanostructures. Vol.11,No.1. 15-23 (2003)
K.Matsumoto:“富勒烯 C_<60> 晶体的光谱椭偏表征和气体吸藏”富勒烯、纳米管和碳纳米结构。
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- 发表时间:
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- 影响因子:0
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MATSUMOTO Koichi其他文献
MATSUMOTO Koichi的其他文献
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