Preparation of Tribological Materials for Microelectromechanical systems

(1)硅单晶的微摩擦学特性及其磨损结构硅单晶的微摩擦学特性是影响微机电系统实用化的重要因素之一。本文主要研究了晶体取向对硅单晶微磨损的影响，以及硅单晶的磨损结构。利用原子力/摩擦力显微镜（AFM/FFM）进行了微摩擦实验，研究了晶体取向对硅单晶微摩擦深度的影响。在这些实验中，AFM/FFM针尖的扫描-划痕方向分别<100><110>在Si（100）表面和<112>Si（111）表面上。结果表明，硅表面产生的磨痕深度按以下顺序增加：<112>，<100>，<100>。对微磨损痕迹进行了横截面TEM观察。结果表明，在第一阶段的表面区域中产生了小的位错环， 关于我们 位错的大小和数量随磨损程度的增加而增加。(2)锆基非晶合金及其复合材料的摩擦学性能采用电弧熔炼法和铸造法制备了锆基非晶合金及其ZrC增强复合材料。在销盘式摩擦磨损试验机上考察了材料的摩擦学性能。结果表明，锆基非晶合金及其复合材料的耐磨性优于传统铝合金A4032（Lowex）。15 vol.%增强Zr基金属玻璃复合材料ZrC粉末具有良好的耐磨性和低的摩擦系数在这项研究中测试的材料。用透射电镜观察了磨痕表面的显微组织.结果发现，在磨损试验后，Zr基金属玻璃的非晶相得以保留。(3)离子束辅助沉积氮化碳（CN）薄膜的力学性能采用离子束辅助沉积方法在Si（001）衬底上制备了CN薄膜。用电子束蒸发碳，同时用一个离子源轰击N和Ar离子。在Ar/N2 = 1的条件下制备的薄膜具有较高的硬度和较好的耐磨性。少

(1) Microtribological properties of silicon single crystal and the wear structureMicrotribology of silicon single crystals is one of the important factors for the practical use of MEMS. In this study, the effect of crystal orientation on microwear of silicon single crystal and the wear structure were mainly investigated. Microfriction experiments using atomic force/friction force microscope (AFM/FFM) were carried out to investigate the effect of crystal orientation on the microwear depth of Silicon single crystals. In these experiments, the scanning-scratching directions of a tip of AFM/FFM were <100> and <110> on Si(100) surface and <112> on Si(111) surface. As a result, it was found that the depth of the wear marks generated on silicon surfaces increased in the following order : <112>, <100>, <100>. Cross-sectional TEM observations of the microwear marks were carried out. As a result, it was found that the small dislocation loops were generated in the surface region at the first stag … More e of the microwear, and the size and the number of dislocations increased with the progress of the microwear.(2) Tribological properties of Zr-based metallic glass and its compositesZr-based metallic glass and its composites reinforced with ZrC powder were prepared by arc-melting and casting. The tribological properties of the materials thus prepared were investigated by using pin-on-disk type wear testing machine. As a result, it was found that the wear resistance of Zr-based metallic glass and its composites was better than that of conventional aluminum alloy A4032(Lowex). Zr-based metallic glass composite reinforced with 15vol.% ZrC powder exhibited a good wear resistance and low friction coefficient among the materials tested in this study. The microstructure of the surface of of the wear traces was observed by TEM. As a result, it was found that amorphous phase of Zr-based metallic glass was preserved after the wear tests.(3) Mechanical properties of CN films prepared by ion-beam-assisted depositionCarbon nitride (CN) films were prepared on Si(001) substrates by ion-beam-assisted deposition. Carbon was evaporated by electron beam and N and Ar ions bombarded simultaneously from one ion source. The films prepared under Ar/N2 ratio of 1 exhibited high hardness and good wear resistance. Less