Tribology of Nanostructured Materials for the Application to the Micromachine

(1)纳米晶材料与金属玻璃的摩擦学研究含有5vol% SiC颗粒的纳米晶Al-Ti-Fe-Cr合金复合材料与含有15vol% ZrC颗粒的zr基金属玻璃及其复合材料相比，具有良好的耐磨性。认为这种良好的耐磨性是由纳米晶或非晶相的高硬度引起的。(2)金属玻璃的超塑性研究：宽过冷液区espt基金属玻璃在过冷液区温度下表现出高应变率的超塑性，伸长率超过1000%。这种良好的变形性是由过冷液体的粘性流动引起的。(3)离子束辅助沉积CN膜的力学性能离子束辅助沉积在Ar/N_2=1.0条件下制备的氮化碳（CN）膜具有低摩擦系数和良好的耐磨性。在使用铝合金或高碳铬钢作为衬底材料的情况下，通过形成碳膜作为两种材料之间的中间层，获得了CN膜与衬底材料之间良好的结合。(4)原子力显微镜（AFM）微摩擦学研究在大于1μN（力）的载荷下，用AFM进行摩擦试验，Si单晶表面出现磨损痕迹。磨损痕迹的深度随载荷的增加而增加。认为大部分磨损损失是由磨损粉的出现引起的。

(1) Study on tribology of nanocrystalline materials and metallic glassesNanocrystalline Al-Ti-Fe-Cr alloy composites containing 5vol% SiC particles, Zr-based metallic glass and its composite containing 15vol% ZrC particles exhibited a good wear resistance compared with the conventional high-strength aluminum alloys. It is considered that this good wear resistance is caused by a high hardness of the nanocrystalline or amorphous phases.(2) Study on superplasticity of metallic glassesPt-based metallic glass with a wide supercooled liquid region exhibited high-strain-rate superplasticity with more than 1000% elongation at a temperature of supercooled liquid region. This good deformability is caused by the viscous flow of the supercooled liquid.(3) Mechanical properties of CN films prepared by Ion-beam-assisted depositionCarbon nitride (CN) films prepared under a condition of Ar/N_2=1.0 by using Ion-beam-assisted deposition had a low friction coefficient and a good wear resistance. In the case of using an aluminum alloy or a high-carbon chromium steel as the substrate material, a good bonding between CN film and the substrate material was obtained by forming a carbon film as an intermediate layer between two materials.(4) Study on micro-tribology by using atomic force microscope (AFM)In the case of friction tests under a load more than 1μN (force) by using AFM, wear traces appeared in the surface of Si single crystals. The depth of the wear traces increased with increasing the load. It is considered that most of the wear loss was caused by the appearance of the worn powder.