Development of Supersonic Free-Jet PVD with nano-sized culsters

纳米级超音速自由喷射 PVD ​​的开发

• 批准号: 14550708
• 负责人: NIWA Naotake
• 金额: $ 1.79万
• 依托单位: Kogakuin University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550708/
• 关键词: nano-cluster; supersonic gas flow; microstructure; coating technology; two phase flow; 超音速ガス流; コーティング技術; ナノコンポジット; Thermal Barrier Coating(TBC); Environmental Barrier Coating(EBC)

Ti-Al and TiN nano-composite coatings are prepared by depositing nano-clusters with supersonic free-jet PVD (SFJ-PVD). The authors have developed SJF-PVD as a new coating method in which a coating film is formed by depositing nano-clusters with very high velocity onto a substrate. The high velocity of nano-clusters is produced by the supersonic gas flow of inert gas. The gas flow is generated by pressure difference between evaporation and deposition chambers and accelerated to supersonic velocity (Mach 3.6) by specially designed supersonic nozzles. A smooth, compact and defect-free microstructure is formed both at the interface between substrates and coating films and inside the coating films. The microstructures of Ti-Al and TiN coatings have very fine grain size. It is confirmed with nano-indentation hardness tester that graded coatings of Ti/Ti-Al and Ti/TiN have graded hardness corresponding to the graduation of composition.

采用超音速自由喷射物理气相沉积（SFJ-PVD）技术制备了Ti-Al和TiN纳米复合涂层。作者开发了SJF-PVD作为一种新的涂层方法，其中通过将纳米团簇以非常高的速度沉积到基底上来形成涂层膜。纳米团簇的高速是由惰性气体的超音速气流产生的。气流由蒸发室和沉积室之间的压力差产生，并由专门设计的超音速喷嘴加速到超音速（马赫数3.6）。在基体与涂层的界面处和涂层内部均形成了光滑、致密、无缺陷的显微组织。Ti-Al和TiN涂层的显微组织具有非常细小的晶粒尺寸。用纳米压痕硬度计证实了Ti/Ti-Al和Ti/TiN梯度涂层具有与成分梯度相对应的硬度梯度。

项目成果

A.Yumoto, T.Yamamoto, F.Hiroki, I.Shiota, N.Niwa: "Graded TiN Coating by Supersonic Free-Jet PVD Combined with Reactive Plasma"Materials Transactions. vol43,No.11. 2932-2934 (2002)

A.Yumoto、T.Yamamoto、F.Hiroki、I.Shiota、N.Niwa：“超音速自由喷射 PVD ​​与反应等离子体相结合的分级 TiN 涂层”材料交易。

A.Yumoto, T.Yamamoto, F.Hiroki, I.Shiota, N.Niwa: "Graded TiN Coating by Supersonic Free-Jet PVD Combined with Reactive Plasma"Materials Transactions. vol43, No.11. 2932-2934 (2002)

A.Yumoto、T.Yamamoto、F.Hiroki、I.Shiota、N.Niwa：“超音速自由喷射 PVD ​​与反应等离子体相结合的分级 TiN 涂层”材料交易。

A.Yumoto, T.Yamamoto, F.Hiroki, I.Shiota, N.Niwa: "Nano-Composite Coatings by Supersonic Free-Jet PVD"Trans.of the Mater.Research Society of Japan. 29(in press). (2004)

A.Yumoto、T.Yamamoto、F.Hiroki、I.Shiota、N.Niwa：“超音速自由喷射 PVD ​​纳米复合涂层”Trans.of the Mater.Research Society of Japan。

A.Yumoto, F.Hiroki, I.Shiota, N.Niwa: "In-situ synthesis of titanium-aluminides in coating with supersonic free-jet PVD using Ti and Al nanoparticles"Surface and Coatings Technology. 169-170. 502-506 (2003)

A.Yumoto、F.Hiroki、I.Shiota、N.Niwa：“使用钛和铝纳米颗粒，通过超音速自由喷射 PVD ​​在涂层中原位合成钛铝化物”表面和涂层技术。

A.Yumoto, T.Yamamoto, F.Hiroki, I.Shiota, N.Niwa: Materials Transactions. vol45, No.5(掲載決定済 ページ未定). (2004)

A.Yumoto、T.Yamamoto、F.Hiroki、I.Shiota、N.Niwa：Materials Transactions，第 45 卷，第 5 期（已决定出版，页码尚未确定）。