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Micro Machining of Glass with Ball End Mill

使用球头立铣刀对玻璃进行微加工

基本信息

批准号：
17360066
负责人：
MATSUMURA Takashi
金额：
$ 7.55万
依托单位：
Tokyo Denki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360066/
关键词：
End mill Glass Cutting Micro machining Cutting force Bio chip

项目摘要

The Lab on a chip such as micro TASs, which is the inspection plates for a small amount of samples, has become popular in the bio or chemical industries. Although chemical etching with hydrofluoric acid has been mainly applied to manufacturing of the chips so far, the processes requires the long time to complete manufacturing with hazardous operations. This study presents glass milling to machine the micro channels on the plates instead of etching. The results may be summarized as follows :(1)A 7-axis machine tool, which consists of the control unit of the tool inclination and the driving unit of the machine table, is developed to machine the micro grooves on the glass plates with keeping the tool inclination. The machining process can be controlled in two manners : the bitmap control and the programmed control. Because most of the cutting operations are performed to machine two-dimensional pattern, the bitmap control can be applied practically.(2)The milling process is applied to mach … More ining of the micro grooves 15-20μm deep and 150-175μm wide on the glass in a feed of the cutter. The ball end mill made of tungsten carbide is used to reduce the machining cost and suppress crack propagation with large edge roundness. A crack-fee surface can be finished in water at a rotational speed of 20000rpm and at a feed rate of 0.48mm/min with the ball end mill inclined at an angle of 45 deg as a set of the applicable cutting conditions. Some models are presented to discuss the effect of the cutter axis inclination on brittle fracture, the surface finish, the cutting temperature during cutting, and the tool wear. Finally a DNA micro array is manufactured to improve the identification of the DNA sequence as a practical application of the presented machining. The micro drains 15μm and 20μm deep with the micro asperities can be fabricated on the glass in milling with the ball end mills in the applicable cutting conditions.(3)A milling tool is developed to improve the production rate by the change of the number of the edges and the edge shape. The developed tool enables us to remove the glass without brittle fracture at 10 times higher feed rate than that of the conventional tool. Less

芯片上的实验室，如Micro Tass，是用于少量样品的检查板，在生物或化工行业中已变得流行起来。尽管目前氢氟酸化学腐蚀主要应用于芯片的制造，但该工艺需要较长的时间才能完成制造，操作危险。本研究提出用玻璃磨削法加工平板上的微通道，而不是刻蚀。主要研究成果如下：(1)研制了一种由刀具倾角控制单元和机床工作台驱动单元组成的七轴联动机床，实现了在保持刀具倾斜度的前提下加工玻璃平板上的微槽。加工过程有两种控制方式：位图控制和程序控制。由于大多数切割操作都是对二维图形进行加工，因此位图控制是可以实际应用的。(2)将位图控制应用于机床…在切割器进给的玻璃上进一步加工深15-20μm、宽150-175μm的微槽。采用碳化钨球头铣刀可降低加工成本，抑制刃口圆度较大的裂纹扩展。作为一套适用的切割条件，球头立铣刀倾斜45°，转速20000rpm，进给速度0.48 mm/min，可在水中加工裂纹表面。建立了刀具轴线倾角对脆性断裂、表面光洁度、切削温度和刀具磨损影响的数学模型。最后制作了DNA微阵列，作为该加工的实际应用，提高了DNA序列的识别能力。在合适的加工条件下，用球头立铣刀在玻璃上可以加工出15μm和20μm深的微细沟槽。(3)研制了一种通过改变刃数和刃形来提高生产率的刀具。研制的工具使我们能够以比传统工具高10倍的进给速度去除玻璃，而不会发生脆性断裂。较少