Basic development research on seismic electret power generation system with micro combustion engine

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Microscale energy sources are attracting much attention targeting at their application to mobile electronic devices, small-scale welfare equipments and autonomous robot such as micro air vehicle. Especially, conversion of chemical energy to electric energy inside those mobile devices has merits, because the energy density of chemical fuels is two orders of magnitude higher that that of high-performance secondary battery. In the present study, we aim at development of micro electret generator using micro engine and ceramic combustor.So far, we have fabricated micro catalytic combustor using high-precision ceramic tape casting technology, which is developed for LSI packaging technology. We successfully integrate nano-porous alumina layer in the ceramic microchannel as the catalytic layer. This combustor yields a combustion density of several 100 MW/m^-3. We have also developed a micro supersonic ejector, which introduces air into the combustor using the fuel pressure.