Development of High Efficiency Gas Treatment System by Pulsed Electron Beam Irradiation

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The purpose of this research project is to develop an effective gaseous treatment system in order to reduce the emission of gaseous compounds including Volatile Organic Compounds (VOCs).A low-energy secondary emission electron gun (SEEG) using wire ion plasma source (WIPS) was applied to generate electron beams. The characteristics of ion beam and secondary electron beam were investigated in order to achieve main objective, which is to increase removal efficiency of VOCs using SEEG. The results of ion beam current measurement showed that there were some limitations at electron accelerating chamber, so the pressure at WIPS can be optimized for 20 mTorr. Distribution of electron beam energy at gas treatment chamber was measured using photosensitive film and it was observed that electron beam filtered in through the electron window at 63 kV and there expected to be small energy losses at the accelerating voltage of 100 kV. At 100 kV, the electron beam reaches the distance as high as 80 mm from electron window and performs enough energy distribution at the dimension of (27x373x60) mm3.Decomposition of benzene and trichloroethylene were studied at the accelerating voltage of 100 kV, the gas volume of 6 L. The degrees of decomposition at the shot number of 1000 were observed as 60 % for benzene and 70 % for trichloroethylene, respectively. The results show that 90 % decomposition of benzene at a flow rate of 3 L/s can be achieved at pulse repetition rate of 2 kHz and SEEG is a promising device for treating VOCs at a small-scale industrial corporation or a smoking area.