Development of Nano-periodic X-ray Multilayer Films for Hard X-ray Optics

用于硬X射线光学的纳米周期X射线多层膜的开发

• 批准号: 18560117
• 负责人: OHNISHI Naoyuki
• 金额: $ 2.39万
• 依托单位: Chubu University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2006
• 资助国家: 日本
• 起止时间: 2006 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560117/
• 关键词: x-ray multilayer; ion-beam sputtering; x-ray reflectivity; X線反射率; パルスアークプラズマ蒸着

High-precision Pt/C multilayer films for the hard x-ray optical applications were fabricated using ECR ion beam sputtering system. Grazing incidence x-ray reflectometry (GDR) and transmission electron microscopy (TEM) studies were performed for measurement of thin film thickness, and evaluation of multilayer structures. From the result of TEM observations, multilayer film was smoothly laminated with no macroscopic structural defect. For the fitting analysis of GIXR intensity profiles, multiply divided structure models were employed to evaluate the deviation of stacking period. It was demonstrated that the deviation of the period, in the 50 layer-pairs, was less than 0.25% (0.01nm), after a development of deposition conditions.

采用ECR离子束溅射系统制备了高精度的硬X射线光学用Pt/C多层膜。掠入射X射线反射仪（GDR）和透射电子显微镜（TEM）的研究进行测量的薄膜厚度，和多层结构的评价。从TEM观察结果来看，多层膜层合光滑，没有宏观结构缺陷。在GIXR强度剖面的拟合分析中，采用多重分割结构模型来评价叠加周期的偏差。实验结果表明，在改变了沉积条件后，在50个层对中，周期的偏差小于0.25%（0.01nm）。

项目成果

ECRイオンビームスパッタ法によるPt/C硬X線多層膜の成膜と評価

ECR离子束溅射法沉积Pt/C硬X射线多层膜并评价

• 发表时间: 2007
• 作者: S. Ito;et. al.;神谷 佳裕
• 通讯作者: 神谷 佳裕

Epitaxial Growth of Er, Ti Doped LiNbO_3 Films Prepared by Sol-Gel Method

溶胶-凝胶法外延生长Er、Ti掺杂LiNbO_3薄膜

• 发表时间: 2006
• 期刊: Jpn. J. Appl. Phys. Part 1 Vol.45, No.9B
• 作者: M. Takahashi;et. al.
• 通讯作者: et. al.

Fabrication of Nano-periodic X-ray Multilayer Films by ECR Ion-beam Sputtering

ECR离子束溅射制备纳米周期X射线多层膜

• 发表时间: 2007
• 作者: Y. Kamiya;et. al.
• 通讯作者: et. al.

Epitaxial Growth of Er,Ti Doped LiNbO_3 Films Prepared by Sol-Gel Method

溶胶-凝胶法外延生长Er,Ti掺杂LiNbO_3薄膜

• 发表时间: 2006
• 期刊: Jpn.J.Appl.Phys.Part 1 Vol.45,No.9B
• 作者: 有泉直輝;吉田政弘;鈴木,鶴巻,吉田;有泉,吉田;花岡,吉田;M.Takahashi
• 通讯作者: M.Takahashi

HRTEM Study of Calcium Fluoride Single Crystal Surfaces Processed by Ultraprecision Machining

超精密加工氟化钙单晶表面的 HRTEM 研究

• 发表时间: 2006
• 期刊: Proc. 16th Int. Microscopy Cong. Vol.3
• 作者: M. Takahashi;et. al.;M.Takahashi;N.Ohnishi
• 通讯作者: N.Ohnishi