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3D microscopy based on optical frequency comb by RF control

基于射频控制光学频率梳的 3D 显微镜

基本信息

批准号：
18360164
负责人：
KUROKAWA Takashi
金额：
$ 10.63万
依托单位：
Tokyo University of Agriculture and Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18360164/
关键词：
microscopy optical frequency comb interferometer OCT 干渉計トモグラフィ

项目摘要

In our previous report, the optical frequency comb generator consisting of two phase modulators in tandem we used generated the narrow bandwidth of the comb spectrum, only 2 nm, and resulted in the limited resolution up to 300μm. And some noises of many side-lobes appeared around the interferometric peaks due to a rectangular frequency comb spectrum. Furthermore, it took a long time for the data acquisition because the point-to-point scanning was used in a fiber-optic interferometer.To improve the performance of our previous system, we introduced new functions of a broad band frequency comb and a line-type image sensor to realize a frequency comb-based interferometric microscope. One of the improvements in the proposed system is that a broadband frequency comb spectrum of over 10 nm was obtained by combining a waveguide type-frequency comb generator^<6-8)> consisting of the phase modulator installed in the Fabry-Perot cavity and a subsequent wavelength equalizer^<9)>. The depth resolut … More ion is finally improved up to 35 μm, and the side-lobes in the interferometric signals also disappeared. Another important improvement is to realize a high-speed observation of three-dimensional images by the use of a line type-image sensor for capturing a line image in a horizontal direction at a time.The measurement resolution narrowed finally to 35 μm by introducing the waveguide-type frequency comb generator and the wavelength equalizer. Furthermore, introducing the line image sensor can obtain the simultaneous measurement of the whole horizontal cross sectional image of the interferometric signal. We successfully demonstrated the 3 dimensional surface profilometry of a Japanese 10-yen coin and observation of a cross sectional tomography image of transparent thin films by varying the comb frequency interval without mechanical shift. The dynamic range in the depth direction was about 1.1 mm and the measurement resolution was 35μm. The standard deviation of seven times thickness measurements was 5μm. Less

在我们之前的报告中，我们使用的由两个串联相位调制器组成的光学频率梳发生器生成的梳状光谱的带宽很窄，只有 2 nm，并导致分辨率高达 300μm。由于矩形频率梳频谱，在干涉峰周围出现了许多旁瓣的一些噪声。此外，由于光纤干涉仪采用点对点扫描，数据采集时间较长。为了提高之前系统的性能，我们引入了宽带频率梳和线型图像传感器的新功能，实现了基于频率梳的干涉显微镜。该系统的改进之一是，通过将波导型频率梳发生器^<6-8)>与安装在法布里-珀罗腔中的相位调制器和随后的波长均衡器^<9)>相结合，获得了超过10 nm的宽带频率梳频谱。离子深度分辨率最终提高到 35 μm，干涉信号中的旁瓣也消失了。另一个重要的改进是利用线型图像传感器一次捕获水平方向的线图像，实现三维图像的高速观察。通过引入波导型频率梳发生器和波长均衡器，测量分辨率最终缩小到35μm。此外，引入线图像传感器可以获得干涉信号的整个水平截面图像的同时测量。我们成功地演示了日本 10 日元硬币的 3 维表面轮廓测量，以及通过在不发生机械移位的情况下改变梳频率间隔来观察透明薄膜的横截面断层扫描图像。深度方向的动态范围约为1.1mm，测量分辨率为35μm。七次厚度测量的标准偏差为5μm。较少的