Nano-chemical modification of diamond surfaces by a probing method in controlled atmosphere

利用扫描探针显微镜，通过电流诱导化学修饰来控制金刚石的表面终止。分析了超高真空下氢气和氧气终止的稳定性。在微波等离子体化学气相沉积原位等离子体分析的基础上，讨论了金刚石成核和氢气终止的条件。经隧道电流处理后，氢端形成的表面导电层转变为绝缘层。

Scanning probe microscopy was utilized for controlling the surface termination of diamond by current-induced chemical modification. Stabilities of hydrogen- and oxygentermination were analyzed in ultrahigh vacuum. Conditions for diamond nucleation and hydrogen termination were discussed on the basis of in-situ plasma analyses in microwave plasma chemical vapor deposition. Surface electric conduction layer caused by hydrogen termination was converted to insulating layer after treatment by tunneling current.