Angle Resolved Spectroscopic Observation of Electron Beam induced Radiation from Nano-Structures excited by Low-Energy Electron Nano-probe

本文研制了一种阴极发光检测系统，使我们能够测量在低电压加速下电子探针照射材料时，纳米尺度区域发射光的角分辨光谱。利用配备球差校正器的扫描透射电子显微镜和新制作的抛物面镜，在80 kV下，电子探针的尺寸达到亚纳米级。观察了银纳米粒子与银表面之间形成的间隙等离子体天线的光发射，并在角分辨光谱图像中发现了一维和二维等离子体晶体中表面等离子体激元的特征色散关系。

Cathodoluminescence detection system has been developed, which enables us to measure the angle-resolved spectrum of emitted light from nano-scale area, when a material is illuminated by an electron probe accelerated by a low voltage. Size of the electron probe reached to sub-nanometer scale at 80 kV by using a scanning transmission electron microscope equipped with a spherical aberration corrector and a newly produced parabolic mirror. Light emission from a gap plasmon antenna formed between a silver nanoparticle and silver surface was observed, and a characteristic dispersion relation of surface plasmon polariton in 1D-and 2D-plasmonic crystals was found in angle-resolved spectral images.