Research on Manufacturing Technology of Etalon : A Core Element of Tunable Dispersion Compensator for Optical Communication, by means of CMG Process

硅基标准具是超高速光纤通信用可调谐色散补偿器的核心元件，要求具有较高的几何精度和表面完整性。为了建立满足这种应用的制造技术，本研究充分利用CMG的优势，开发了一套一站式磨削系统。通过对CMG砂轮和工艺的优化，成功地将8英寸硅片厚度降至15μm，厚度为0.3μm。

Si based etalon is a core element of tunable dispersion compensator for ultra high-speed optical communication, which demands both high geometrical accuracy and high surface integrity. Aiming at establishing manufacturing technology to fulfill such application, this research has developed a one-stop grinding system by full use of the advantage of CMG. After optimizations of CMG wheel and process, it was successful to thin 8 inch Si wafer down to 15μm with GBIR<0.3μm.