Study on the characterization and grinding technology of "soft-brittle" functional materials

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New functional materials has been developed to meet the requirements from semiconductor and optical industries recently. Most of those materials are made in single crystal and present "soft-and-brittle" characteristic in their mechanical property, thus are very difficult to be machined.As a typical multi-functional single crystal material, Lithium tantalate (LiTaO3 or LT) exhibits its excellent electro-optical, pyroelectric and piezoelectric properties, and has now been widely applied into many applications, especially in the telecommunication field. However, its mechanical and physical properties and the influence on the grinding performance are still not fully understood. This research project aims to establishment of a fixed abrasive process for LT wafers to achieve both high geometry accuracy and surface integrity, via discovery of influence of the mechanical and physical properties of "soft-and-brittle" materials, especially, its pyroelectric effect and piezoelectric effect.