Study on nanocrystalline silicon planar cathodes with low emission divergence and narrow electron energy spread

低发射发散窄电子能展纳米晶硅平面阴极研究

• 批准号: 20560333
• 负责人: SHIMAWAKI Hidetaka
• 金额: $ 2.91万
• 依托单位: Hachinohe Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20560333/
• 关键词: 微小冷陰極; トンネル電子放射; エミッションプロファイル; エネルギー分析; シリコン微結晶; 真空ナノエレクトロニクス; トンネル放射; 平面型冷陰極

We investigated emission uniformity from the planar cathodes based on nc-Si prepared by pulsed Nd : YAG laser ablation. Distributions of electron emission showed strong dependence on thin metal morphology. The emission occurred at limited parts of the emission area for the cathode with discontinuous metal and the whole for the cathode with continuous metal due to series resistance effects. Continuity and conductivity of thin metal film are important for uniform and high directional emission from the planar cathodes.

研究了脉冲Nd：YAG激光烧蚀制备的nc-Si平板阴极的发射均匀性。电子发射的分布表现出强烈的依赖于薄金属形态。由于串联电阻效应，不连续金属阴极的发射区仅限于局部，而连续金属阴极的发射区则全部发生。金属薄膜的连续性和导电性对于平面阴极的均匀和高方向性发射是重要的。

项目成果

Evaluation of emission uniformity of nanocrystalline silicon planar cathodes

• DOI: 10.1116/1.3271165
• 发表时间: 2010-04
• 期刊: Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
• 作者: H. Shimawaki;K. Murakami;Y. Neo;H. Mimura;F. Wakaya;M. Takai

nc-Si MOSカソードのエミッション均一性の評価

nc-Si MOS阴极发射均匀性评价

• 发表时间: 2009
• 作者: 嶋脇秀隆;村上勝久;木田庸;根尾陽一郎;三村秀典;若家富士夫;高井幹夫
• 通讯作者: 高井幹夫

Emission uniformity of nanocrystalline silicon based metal-oxide-semiconductor cathodes

纳米晶硅基金属氧化物半导体阴极的发射均匀性

• 发表时间: 2009
• 期刊: Tech. Digest of the 22nd Int. Vacuum Nanoelectronics Conf.
• 作者: H. Shimawaki;K. Murakami;Y. Kida;Y. Neo;H. Mimura;F. Wakaya;and M. Takai
• 通讯作者: and M. Takai

Intensity Distribution of Electron Emission from nc-Si MOS Cathode

nc-Si MOS 阴极电子发射强度分布

• 发表时间: 2009
• 期刊: Proc. of the 16th Int. Display Workshops
• 作者: H. Shimawaki;K. Murakami;Y. Neo;H. Mimura;F. Wakaya;and M. Takai
• 通讯作者: and M. Takai

nc-SiMOSカソードの電子放射特性

nc-SiMOS阴极的电子发射特性

• 发表时间: 2009
• 期刊: 信学技報 108
• 作者: Y.Moriyama;Y.Ashizawa;K.Nakagawa;T.Sako;A.Tsukamoto;A.Itoh;木田 庸
• 通讯作者: 木田 庸