Study on wave-guide quasi-planer hot electron bolometers.

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To improve the IF bandwidth of hot-electron bolometers (HEB), we have developed fabrication process of quasi-planer nano-bridges. Quasi optical HEB mixers constructed by quasi-planer nano bridges were fabricated and the lengths and widths of nano-bridge were about 450 nm and 25 nm, respectively. The DSB receiver noise temperature and IF bandwidth were evaluated. The SiO_2 film having about 20 μm thickness was deposited as a substrate for waveguide mixers, and good flatness was confirmed.