Development of intense pulsed heavy ion beam and its application to ion implantation technology for next generation semiconductor
强脉冲重离子束的研制及其在下一代半导体离子注入技术中的应用
基本信息
- 批准号:20740319
- 负责人:
- 金额:$ 2.75万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Young Scientists (B)
- 财政年份:2008
- 资助国家:日本
- 起止时间:2008 至 2009
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
In order to improve the purity of the intense pulsed ion beam a new type of a pulsed ion beam accelerator named "bipolar pulse accelerator (BPA)" has been proposed and developed. The BPA system utilizes a magnetically insulated acceleration gap and is operated with the bipolar pulse. When the bipolar pulse with voltage of about ±100 kV and pulse duration of about 70 ns was applied to the drift tube, the ions were successfully accelerated from the grounded anode to the drift tube in the 1st gap by the negative pulse of the bipolar pulse and the pulsed ion beam with current density of 40 A/cm^2 and pulse duration of 30 ns was obtained at 50 mm downstream from the anode surface. In addition, part of the ion beam was again accelerated toward the grounded cathode in the 2nd gap by the positive pulse of the bipolar pulse. The pulsed ion beam with the peak ion current density of 10 A/cm^2 and the beam pulse duration of 30 ns was obtained at 30 mm downstream from the cathode surface.
为了提高强流脉冲离子束的纯度,提出并研制了一种新型脉冲离子束加速器--双极脉冲加速器(BPA)。BPA系统使用磁绝缘加速间隙,并以双极脉冲运行。在漂移管上施加电压约为±100kV、脉冲宽度约为70 ns的双极脉冲,利用双极脉冲的负脉冲成功地将离子从接地阳极加速到第一间隙的漂移管,并在距阳极表面50 mm处获得了电流密度为40A/cm2、脉冲宽度为30 ns的脉冲离子束。此外,部分离子束被双极脉冲的正脉冲再次加速朝向第二间隙中的接地阴极。在距阴极表面30 mm处获得了峰值离子电流密度为10A/cm2、束流脉冲宽度为30 ns的脉冲离子束。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Evaluation of Bipolar Pulse Generator for High-purity Pulsed Ion Beam
高纯脉冲离子束双极脉冲发生器的评价
- DOI:
- 发表时间:2008
- 期刊:
- 影响因子:0
- 作者:H. Ito;I. Kitamura;K. Masugata
- 通讯作者:K. Masugata
Characterization of Intense Pulsed Aluminum Ion Beam by Mag netically Insulated Diode with Vacuum Arc Ion Source
真空电弧离子源磁绝缘二极管强脉冲铝离子束表征
- DOI:
- 发表时间:2008
- 期刊:
- 影响因子:0
- 作者:H. Ito;et.al.
- 通讯作者:et.al.
Development of High Current Pulsed Aluminum Ion Beam with Ion Source of Vacuum Arc Plasma Gun
真空电弧等离子枪离子源大电流脉冲铝离子束的研制
- DOI:
- 发表时间:2009
- 期刊:
- 影响因子:0
- 作者:K. Fujikawa;H. Miyake;H. Ito;K. Masugata
- 通讯作者:K. Masugata
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ITO Hiroaki其他文献
Student self-assessment for learning improvement: OPPA in lower secondary school science class
学生学习改进自我评估:初中科学课中的OPPA
- DOI:
- 发表时间:
2020 - 期刊:
- 影响因子:0
- 作者:
ITO Hiroaki;NAKAJIMA Masako, - 通讯作者:
NAKAJIMA Masako,
子どもの存在は伝統化した家事分担を定着させるのかー要因配置実験を用いた家事分担の公平評価に関する検討ー
孩子的存在是否让传统的家务分工更加根深蒂固?基于因子分配实验的家务分工公平评价研究——
- DOI:
- 发表时间:
2022 - 期刊:
- 影响因子:0
- 作者:
ITO Hiroaki;MIURA Akira;GOTO Yosuke;MIZUGUCHI Yoshikazu;MORIYOSHI Chikako;KUROIWA Yoshihiro;ROSERO-NAVARRO Nataly Carolina;TADANAGA Kiyoharu;片岡純也;尾藤 央延 - 通讯作者:
尾藤 央延
Phase transition, magnetic, and electronic properties of CeOInS<sub>2</sub>
CeOInS<sub>2</sub>的相变、磁性和电子特性
- DOI:
10.2109/jcersj2.20205 - 发表时间:
2021 - 期刊:
- 影响因子:1.1
- 作者:
ITO Hiroaki;MIURA Akira;GOTO Yosuke;MIZUGUCHI Yoshikazu;MORIYOSHI Chikako;KUROIWA Yoshihiro;ROSERO-NAVARRO Nataly Carolina;TADANAGA Kiyoharu - 通讯作者:
TADANAGA Kiyoharu
Universal detection and genome sequencing technologies for phytoplasmas toward elucidating their diversity and risks in the Pacific island countries
植原体通用检测和基因组测序技术,以阐明其在太平洋岛国的多样性和风险
- DOI:
- 发表时间:
2021 - 期刊:
- 影响因子:0
- 作者:
ITO Hiroaki;MIURA Akira;GOTO Yosuke;MIZUGUCHI Yoshikazu;MORIYOSHI Chikako;KUROIWA Yoshihiro;ROSERO-NAVARRO Nataly Carolina;TADANAGA Kiyoharu;前島健作・宮﨑彰雄・丹野和幸・鈴木拓海・鯉沼宏章・岩渕望・難波成任・山次康幸;Toshiro Shigaki - 通讯作者:
Toshiro Shigaki
知識の逸脱性に対する時間を通じた評価の変化 -特許を利用した探索的な分析-
知识偏差评估随时间的变化 - 使用专利的探索性分析 -
- DOI:
- 发表时间:
2023 - 期刊:
- 影响因子:0
- 作者:
ITO Hiroaki;MIURA Akira;GOTO Yosuke;MIZUGUCHI Yoshikazu;MORIYOSHI Chikako;KUROIWA Yoshihiro;ROSERO-NAVARRO Nataly Carolina;TADANAGA Kiyoharu;片岡純也 - 通讯作者:
片岡純也
ITO Hiroaki的其他文献
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{{ truncateString('ITO Hiroaki', 18)}}的其他基金
Establishment of evaluation technique for thermo-viscoelastic property of glass using viscosity measurement
利用粘度测量建立玻璃热粘弹性性能评价技术
- 批准号:
18K03856 - 财政年份:2018
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Scientific Research (C)
Contactless Pulsed Power Transfer System using Pulsed Power Technology for Running Electric Vehicle
使用脉冲功率技术运行电动汽车的非接触式脉冲功率传输系统
- 批准号:
16K14211 - 财政年份:2016
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Challenging Exploratory Research
Development of bipolar pulse accelerator by using pulsed power technology and creation of inovative pulsed ion implatation
利用脉冲功率技术开发双极脉冲加速器并创造创新的脉冲离子注入
- 批准号:
15H03961 - 财政年份:2015
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Evaluation of adhesion quality and durability of die mold releasing agent for glass press molding at high temperature
高温玻璃模压成型用模具脱模剂的粘合质量和耐久性评价
- 批准号:
15K21354 - 财政年份:2015
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Young Scientists (B)
Verification of ion implantation method using intense pulsed heavy ion beam for next generation semiconductor
使用强脉冲重离子束的离子注入方法验证下一代半导体
- 批准号:
24540534 - 财政年份:2012
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Scientific Research (C)
Mechanism for photochemical reaction of organically complexed iron
有机络合铁的光化学反应机理
- 批准号:
24860013 - 财政年份:2012
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Research Activity Start-up
Influence and transformation of Aesop's Fables in Japan
伊索寓言对日本的影响与变革
- 批准号:
23652068 - 财政年份:2011
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Challenging Exploratory Research
Possibility of Aeshtetics and Cultural Sciences in Warburg
瓦尔堡美学和文化科学的可能性
- 批准号:
23320028 - 财政年份:2011
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Generation of intense pulsed metallic ion beam for next generation semiconductor and its application to ion implantation
下一代半导体强脉冲金属离子束的产生及其在离子注入中的应用
- 批准号:
22740360 - 财政年份:2010
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Young Scientists (B)
Study of Sibyls in Italian Renaissance
意大利文艺复兴时期的女预言家研究
- 批准号:
19520093 - 财政年份:2007
- 资助金额:
$ 2.75万 - 项目类别:
Grant-in-Aid for Scientific Research (C)