Development of intense pulsed heavy ion beam and its application to ion implantation technology for next generation semiconductor

强脉冲重离子束的研制及其在下一代半导体离子注入技术中的应用

• 批准号: 20740319
• 负责人: ITO Hiroaki
• 金额: $ 2.75万
• 依托单位: University of Toyama
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2009
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20740319/
• 关键词: パルス重イオンビーム; 両極性パルス加速器; パルスパワー技術; パルスイオン注入

In order to improve the purity of the intense pulsed ion beam a new type of a pulsed ion beam accelerator named "bipolar pulse accelerator (BPA)" has been proposed and developed. The BPA system utilizes a magnetically insulated acceleration gap and is operated with the bipolar pulse. When the bipolar pulse with voltage of about ±100 kV and pulse duration of about 70 ns was applied to the drift tube, the ions were successfully accelerated from the grounded anode to the drift tube in the 1st gap by the negative pulse of the bipolar pulse and the pulsed ion beam with current density of 40 A/cm^2 and pulse duration of 30 ns was obtained at 50 mm downstream from the anode surface. In addition, part of the ion beam was again accelerated toward the grounded cathode in the 2nd gap by the positive pulse of the bipolar pulse. The pulsed ion beam with the peak ion current density of 10 A/cm^2 and the beam pulse duration of 30 ns was obtained at 30 mm downstream from the cathode surface.

为了提高强流脉冲离子束的纯度，提出并研制了一种新型脉冲离子束加速器--双极脉冲加速器(BPA)。BPA系统使用磁绝缘加速间隙，并以双极脉冲运行。在漂移管上施加电压约为±100kV、脉冲宽度约为70 ns的双极脉冲，利用双极脉冲的负脉冲成功地将离子从接地阳极加速到第一间隙的漂移管，并在距阳极表面50 mm处获得了电流密度为40A/cm2、脉冲宽度为30 ns的脉冲离子束。此外，部分离子束被双极脉冲的正脉冲再次加速朝向第二间隙中的接地阴极。在距阴极表面30 mm处获得了峰值离子电流密度为10A/cm2、束流脉冲宽度为30 ns的脉冲离子束。

项目成果

Evaluation of Bipolar Pulse Generator for High-purity Pulsed Ion Beam

高纯脉冲离子束双极脉冲发生器的评价

• 发表时间: 2008
• 期刊: Research Report NIFS-PROC 72
• 作者: H. Ito;I. Kitamura;K. Masugata
• 通讯作者: K. Masugata

プラズマフォーカス装置から発生するプロトンビームの特性評価

等离子体聚焦装置产生的质子束特性评估

• 发表时间: 2010
• 作者: 西野勇紀;他5名
• 通讯作者: 他5名

Characterization of Intense Pulsed Aluminum Ion Beam by Mag netically Insulated Diode with Vacuum Arc Ion Source

真空电弧离子源磁绝缘二极管强脉冲铝离子束表征

• 发表时间: 2008
• 期刊: Proc. of The 17th International Conference on High-Power Particle Beams
• 作者: H. Ito;et.al.
• 通讯作者: et.al.

両極性パルス加速器用電源の特性評価

双极脉冲加速器电源特性评估

• 发表时间: 2009
• 作者: 高部淳二;他2名
• 通讯作者: 他2名

Development of High Current Pulsed Aluminum Ion Beam with Ion Source of Vacuum Arc Plasma Gun

真空电弧等离子枪离子源大电流脉冲铝离子束的研制

• 发表时间: 2009
• 期刊: Research Report NIFS-PROC 79
• 作者: K. Fujikawa;H. Miyake;H. Ito;K. Masugata
• 通讯作者: K. Masugata