Development of mirco DLC coating method using high-density plasma flow generated by pulsed arc discharge

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The possibility of diamond-like carbon coating to the inside of narrow slit (less than a few hundred microns in width) by using ultra-high-density plasma flow generated by pulsed arc discharge was investigated. It was revealed that inclusion of small amount of water molecule in coating chamber is effective to increase the hardness of the DLC film deposited by pulsed plasma ablation of PTFE. Then, DLC coating to slits 1.0, 0.5, 0.2 mm in width, which was made by 2 stainless-steel plate, was attempted ; the results showed that the length of 10 mm from the entrance of the silt was coated in the case of 1.0 mm slit, while almost no film was coated in the cases of 0.5 and 0.2 mm slits.