Fabrication of highly-functional polymer surface using very-low-potential plasma and its evaluation

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For fabrication of highly-functional polymer surface, modification of plasma surface modification has been performed using inductivity-coupled plasma sources have been developed with multiple low-inductance antenna (LIA) modules, which have allowed low-voltage operation of ICPs. Non-destructive depth analysis of chemical bonding states showed that low-potential ICP of argon/oxygen mixture gas resulted in oxidation of polymer surface only in a few nm regions, without degradation beneath the 10nm depth by oxygen radicals or ions. Surface roughness of the polymer slightly increased with increasing ion dose, while the average peak interval considerably decreased with ion dose. These results indicate the feasibility of control of structure and chemical bonding state of polymer surface via controlling the plasma.