Development of low-temperature high-speed deposition method for forming a high-quality zinc oxide thin films using atmospheric pressure non-equilibrium plasma

为了制造下一代柔性器件，已经使用大气压非平衡等离子体进行了高质量氧化锌薄膜的低温高速沉积技术的开发。为了研究液体和等离子体之间的相互作用，在等离子体/液体界面上测量了光发射。 光学发射光谱显示归因于水的解离的OH自由基的发射。 此外，还研究了等离子体与液体中有机分子的相互作用。 该结果表明，从等离子体通过气液界面供给的有助于氧化的自由基已经影响到液体中的有机分子。在此基础上，利用常压非平衡等离子体辐照溶解了薄膜前驱体的液滴，实现了氧化锌薄膜的低温沉积。

For fabrication of a next generation flexible device, development of low-temperature high-speed deposition technology of high- quality zinc oxide thin film have been carried out using atmospheric pressure non-equilibrium plasma. In order to investigate interaction between liquid and plasma, optical emission has been measured on the plasma/liquid interface. The optical emission spectrum shows emission of OH radicals attributed to dissociation of water. Furthermore, the interaction of the plasma with organic molecules in liquid have been investigated. This result showed that the radicals contributing to oxidation supplied through the gas-liquid interface from the plasma has affected the organic molecules into the liquid. Based on these results, low temperature deposition of zinc oxide thin film has been demonstrated by irradiation of atmospheric pressure non-equilibrium plasma to the droplet dissolved the film precursor.