Nano profile measurement by depolarization microscope

提出了一种基于退偏显微镜的光纤型偏振仪，用于评估纳米结构的表面轮廓。从斯托克斯参数检测的生成分析中，按1：3的比例得出了双旋转斯托克斯偏振仪的延迟器和检偏器转速的最佳组合。利用退偏显微镜对样品结构进行反射和散射，根据偏振信息确定纳米结构的轮廓

An optical fiber type of polarimeter which is based on a depolarization microscopy is proposed to evaluate the surface profiles of nanostructures. The best combination of rotating speed of a retarder and an analyzer for dual rotating Stokes polarimeter is carried out in the proportion of one part to three from generated analysis for Stokes parameters detection. A nanostructure profile is determined from the polarization information which happens reflection and scatter of sample structures by depolarization microscopy