Development of the micro-fabrication method for making specular surface by laser processing and wet etching

激光加工和湿法蚀刻镜面微加工方法的开发

• 批准号: 22760106
• 负责人: WAKABAYASHI Masaki
• 金额: $ 2.75万
• 依托单位: Tokyo Metropolitan Industrial Technology Research Institute
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22760106/
• 关键词: レーザ加工; 微細加工; 精密加工; ガラス; Nd : YAGレーザ; エッチング; YAGレーザ

To enable processing of various mirror shapes in the micro-fabrication method for making specular surface by laser processing and wet etching, I investigated a combination of glass materials and the laser absorbing materials. The glass surface which was sputtered with copper or chrome was processed by YAG laser. However, it was difficult to fabricate mirror groove or cavity. On the other hands, a part of the epoxy based resin on the fused silica was removed by YAG laser, after wet etching for 4 hours, it was able to form 373μm in width, 31μm in depth, 33nmRa in surface roughness, a mirror groove as micro flow channels.

为了能够在激光加工和湿法刻蚀镜面的微加工方法中加工各种镜面形状，我研究了玻璃材料和激光吸收材料的组合。对溅射铜或铬的玻璃表面进行了激光处理。然而，制作镜面凹槽或腔体是很困难的。另一方面，用激光去除熔融二氧化硅表面的部分环氧基树脂，湿法腐蚀4h后，可以形成宽度373nmm，深度31nmRa，表面粗糙度33nmRa的镜面沟槽作为微流道。

项目成果

表面機能を創成するレーザ微細加工

激光微加工创建表面功能

• 发表时间: 2010
• 期刊: レーザ協会誌
• 作者: M.Okayasu;S.Takeuchi;T.Shiraishi;若林正毅
• 通讯作者: 若林正毅