Development of the micro-fabrication method for making specular surface by laser processing and wet etching

为了能够在激光加工和湿法刻蚀镜面的微加工方法中加工各种镜面形状，我研究了玻璃材料和激光吸收材料的组合。对溅射铜或铬的玻璃表面进行了激光处理。然而，制作镜面凹槽或腔体是很困难的。另一方面，用激光去除熔融二氧化硅表面的部分环氧基树脂，湿法腐蚀4h后，可以形成宽度373nmm，深度31nmRa，表面粗糙度33nmRa的镜面沟槽作为微流道。

To enable processing of various mirror shapes in the micro-fabrication method for making specular surface by laser processing and wet etching, I investigated a combination of glass materials and the laser absorbing materials. The glass surface which was sputtered with copper or chrome was processed by YAG laser. However, it was difficult to fabricate mirror groove or cavity. On the other hands, a part of the epoxy based resin on the fused silica was removed by YAG laser, after wet etching for 4 hours, it was able to form 373μm in width, 31μm in depth, 33nmRa in surface roughness, a mirror groove as micro flow channels.