Development of the micro-fabrication method for making specular surface by laser processing and wet etching

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To enable processing of various mirror shapes in the micro-fabrication method for making specular surface by laser processing and wet etching, I investigated a combination of glass materials and the laser absorbing materials. The glass surface which was sputtered with copper or chrome was processed by YAG laser. However, it was difficult to fabricate mirror groove or cavity. On the other hands, a part of the epoxy based resin on the fused silica was removed by YAG laser, after wet etching for 4 hours, it was able to form 373μm in width, 31μm in depth, 33nmRa in surface roughness, a mirror groove as micro flow channels.