Development of Nano-scale structure design and process technology by advanced composite cluster beam

构建了复合簇束生成装置，用氩气和甲醇、水、α-三氯乙烷等液体材料组成簇束。用CH3OH-Ar复合簇离子束辐照Si靶材时，复合簇离子从Si中释放出的二次离子强度是Ar簇离子的10倍。结果表明，CH3OH-Ar复合簇离子束可作为二次离子质谱的探测束。

Composite cluster beam generation apparatus was constructed and clusters composed with Ar gas and liquid materials, such as methanol, water or α-trichloroethane, were formed. When a Si target was irradiated with the CH3OH-Ar composite cluster ion beam, the intensity of secondary ions from the Si by composite cluster ion was 10 times higher than that by Ar cluster ion. This result shows that the CH3OH-Ar composite cluster ion beam is useful as probe beam of secondary ion mass spectroscopy.