Research on low-cost and large deflection angle MEMS mirrors using photo-sensitive polymer materials.

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The new constructions of the MEMS mirror devices using polymer materials are proposed, and the technologies to realize the devices are examined. Two types of the devices are proposed, one is an electro-magnetic driven type device and the other is an outer magnetic driven type device using SU-8 containing micro magnetic particles. The devices are designed based on the evaluated polymer mechanical properties. As the results, the low cost fabrication was achieved owing to the simplified process and the large optical deflection angle more than 20 degrees was also achieved.