Clarification of production mechanism of polyimide insupercritical carbon dioxide and application to microfabrication technique

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In the present work, the changes of phase behaviors were clarified during reaction of production of polyamic acid, which is intermediate of polyimide, in supercritical carbon dioxide. And the relationship between the polymerization condition and the molecular weight of produced polyamic acid. Moreover, the high-pressure apparatus for microfabrication of polyimide was newly developed, and the relationships operating condition, deposition rate and morphology of polyimide thin film were clarified. Finally, the implantation of polyimide into the microscopic space on the surface of the substrate was discussed.