Clarification of production mechanism of polyimide insupercritical carbon dioxide and application to microfabrication technique

超临界二氧化碳下聚酰亚胺生产机理的阐明及其在微加工技术中的应用

• 批准号: 23760722
• 负责人: HARUKI Masashi
• 金额: $ 2.91万
• 依托单位: Hiroshima University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23760722/
• 关键词: ポリイミド; 超臨界二酸化炭素; 薄膜; 埋め込み; 微細加工; ポリアミド酸

In the present work, the changes of phase behaviors were clarified during reaction of production of polyamic acid, which is intermediate of polyimide, in supercritical carbon dioxide. And the relationship between the polymerization condition and the molecular weight of produced polyamic acid. Moreover, the high-pressure apparatus for microfabrication of polyimide was newly developed, and the relationships operating condition, deposition rate and morphology of polyimide thin film were clarified. Finally, the implantation of polyimide into the microscopic space on the surface of the substrate was discussed.

本文研究了超临界二氧化碳条件下聚酰亚胺中间体聚酰胺酸的合成过程中物相行为的变化。并研究了聚合条件与产物分子量的关系。此外，还研制了聚酰亚胺微细加工高压装置，阐明了操作条件、沉积速率与聚酰亚胺薄膜形貌之间的关系。最后，讨论了聚酰亚胺在衬底表面微观空间的注入。

项目成果

Polymerization of polyimide monomers in supercritical carbon dioxide

超临界二氧化碳中聚酰亚胺单体的聚合

• 发表时间: 2012
• 作者: Y. Hasegawa;M. Haruki;N. Fukui;S. Kihara;S. Takishima
• 通讯作者: S. Takishima

Measurement and prediction of the solubilities of aromatic polyimide monomers in supercritical carbon dioxide with acetone

• DOI: 10.1016/j.jct.2012.04.013
• 发表时间: 2012-11-01
• 期刊: JOURNAL OF CHEMICAL THERMODYNAMICS
• 影响因子: 2.6
• 作者: Haruki, Masashi;Fukui, Naoya;Takishima, Shigeki
• 通讯作者: Takishima, Shigeki

超臨界二酸化炭素を利用したポリイミドの微細加工に関する基礎的検討

超临界二氧化碳微细加工聚酰亚胺的基础研究

• 发表时间: 2013
• 作者: 長谷川優美;福井直也;春木将司;木原伸一;滝嶌繁樹
• 通讯作者: 滝嶌繁樹

金属錯体の昇華圧と超臨界二酸化炭素に対する溶解度

金属配合物的升华压力和在超临界二氧化碳中的溶解度

• 发表时间: 2013
• 作者: 森岡美帆;大原未奈美;春木将司;木原伸一;滝嶌繁樹
• 通讯作者: 滝嶌繁樹

Measurement and calculation of solubilities for the organic metal complexes in supercritical carbon dioxide

有机金属配合物在超临界二氧化碳中溶解度的测量和计算

• 发表时间: 2013
• 作者: M. Haruki;M. Ohara;M. Morioka;S. Kihara;S. Takishima
• 通讯作者: S. Takishima