高温対応ダイヤモンドMEMS磁気センサ

高温金刚石MEMS磁传感器

• 批准号: 22KF0382
• 负责人: 廖 梅勇
• 金额: $ 1.47万
• 依托单位: National Institute for Materials Science
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for JSPS Fellows
• 财政年份: 2023
• 资助国家: 日本
• 起止时间: 2023-03-08 至 2024-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22KF0382/
• 关键词: ダイヤモンド; MEMS; 磁気センサ

The aim of this project is to develop high-temperature diamond MEMS magnetic sensors that can operate up to 500oC. In this year, to improve the magnetic sensing properties at high temperatures, different interlayers of Ti film, WC film, and WC/Ti film were adopted between the diamond cantilevers and the FeGa thin films in the MEMS magnetic sensors. The thermal-stability of the microstructures, phase structures, and magnetic properties of the FeGa thin films were greatly enhanced by these interlayers. The magnetic sensor with the FeGa/SCD structure has the weakest magnetic sensitivity of 1.96 Hz/mT @573 K and the FeGa/WC/Ti/SCD structure held the highest magnetic sensitivity of 75.40 Hz/mT @673 K. We also developed the on-chip diamond MEMS magnetic sensor up to 773K.

这个项目的目的是开发高温金刚石MEMS磁传感器，可以工作到500℃。今年，为了提高MEMS磁传感器的高温磁敏性能，在金刚石悬臂梁和FeGa薄膜之间采用了不同的Ti膜、WC膜和WC/Ti膜夹层。这些中间层大大提高了FeGa薄膜的显微结构、相结构和磁性能的热稳定性。FeGa/SCD结构的磁灵敏度最低，为1.96 Hz/mT @573 K， FeGa/WC/Ti/SCD结构的磁灵敏度最高，为75.40 Hz/mT @673 K。我们还开发了高达773K的片上金刚石MEMS磁传感器。

项目成果

Enhancement of Magnetic Sensing Performances of Single-crystal Diamond Resonators through Various Interlayers

通过各种中间层增强单晶金刚石谐振器的磁传感性能

• 发表时间: 2022
• 作者: ZHANG;Zilong;SANG;Liwen;KOIDE;Yasuo;KOIZUMI;Satoshi;LIAO;Meiyong
• 通讯作者: Meiyong

Enhancement of magnetic sensing performance of diamond resonators coupling with magnetic-strictive FeGa films by various interlayers

• DOI: 10.1016/j.carbon.2022.08.086
• 发表时间: 2022-09
• 期刊: Carbon
• 影响因子: 10.9
• 作者: Zilong Zhang;L. Sang;Jian Huang;Linjun Wang;Y. Koide;S. Koizumi;M. Liao

On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film

• DOI: 10.1002/adfm.202300805
• 发表时间: 2023-03
• 期刊: Advanced Functional Materials
• 影响因子: 19
• 作者: Zilong Zhang;Wen Zhao;Guo Chen;M. Toda;S. Koizumi;Y. Koide;M. Liao