高温対応ダイヤモンドMEMS磁気センサ

这个项目的目的是开发高温金刚石MEMS磁传感器，可以工作到500℃。今年，为了提高MEMS磁传感器的高温磁敏性能，在金刚石悬臂梁和FeGa薄膜之间采用了不同的Ti膜、WC膜和WC/Ti膜夹层。这些中间层大大提高了FeGa薄膜的显微结构、相结构和磁性能的热稳定性。FeGa/SCD结构的磁灵敏度最低，为1.96 Hz/mT @573 K， FeGa/WC/Ti/SCD结构的磁灵敏度最高，为75.40 Hz/mT @673 K。我们还开发了高达773K的片上金刚石MEMS磁传感器。

The aim of this project is to develop high-temperature diamond MEMS magnetic sensors that can operate up to 500oC. In this year, to improve the magnetic sensing properties at high temperatures, different interlayers of Ti film, WC film, and WC/Ti film were adopted between the diamond cantilevers and the FeGa thin films in the MEMS magnetic sensors. The thermal-stability of the microstructures, phase structures, and magnetic properties of the FeGa thin films were greatly enhanced by these interlayers. The magnetic sensor with the FeGa/SCD structure has the weakest magnetic sensitivity of 1.96 Hz/mT @573 K and the FeGa/WC/Ti/SCD structure held the highest magnetic sensitivity of 75.40 Hz/mT @673 K. We also developed the on-chip diamond MEMS magnetic sensor up to 773K.