高温対応ダイヤモンドMEMS磁気センサ

该项目的目标是开发可在高达500 ℃下工作的高温金刚石MEMS磁传感器。近年来，为了提高MEMS磁传感器的高温磁敏感性能，在金刚石悬臂梁和FeGa薄膜之间采用了Ti膜、WC膜和WC/Ti膜等不同的中间层。FeGa薄膜的微结构、相结构和磁性能的热稳定性都得到了很大的提高。 FeGa/SCD结构的磁敏元件在573 K时的磁灵敏度最低，为1.96 Hz/mT; FeGa/WC/Ti/SCD结构的磁敏元件在673 K时的磁灵敏度最高，为75.40 Hz/mT。我们还开发了高达773 K的片上金刚石MEMS磁传感器。

The aim of this project is to develop high-temperature diamond MEMS magnetic sensors that can operate up to 500oC. In this year, to improve the magnetic sensing properties at high temperatures, different interlayers of Ti film, WC film, and WC/Ti film were adopted between the diamond cantilevers and the FeGa thin films in the MEMS magnetic sensors. The thermal-stability of the microstructures, phase structures, and magnetic properties of the FeGa thin films were greatly enhanced by these interlayers. The magnetic sensor with the FeGa/SCD structure has the weakest magnetic sensitivity of 1.96 Hz/mT @573 K and the FeGa/WC/Ti/SCD structure held the highest magnetic sensitivity of 75.40 Hz/mT @673 K. We also developed the on-chip diamond MEMS magnetic sensor up to 773K.