University of Surrey Ion Beam Centre

该提案旨在支持成功的国家离子束中心的开发、培训和核心组成部分。未来四年的创新包括：扩展DanFysik注入机，使其具有低能量能力（低至200 eV）;更换2 MV注入机上的束线，使其具有8英寸晶圆能力;为离子束诱导损伤研究增加可验证的低剂量能力。目前正在从其他来源筹集资金，以建立一个水平和垂直的纳米束，以扩大离子束分析能力，并利用生物医学接口进行研究。这些发展的另一个好处是，IBC将能够将其研究基础从微电子材料扩展到新的领域，包括文化遗产，生物医学应用，纳米技术和地质学和宇宙学。在四年的时间里，我们预计IBC将获得资金：三分之一来自行业;三分之一来自其他资助机构;三分之一来自EPSRC。这将大大减少从EPSRC申请的资金数额。IBC内部的效率提高将使我们能够将票价从目前的240美元降低到新资助期的180美元。

This proposal is to support the development, training and core componants of the successful national Ion Beam Centre. Innovations over the next four years include: extending the DanFysik Implanter to give a low energy capability (down to 200 eV); replacing the beam line on the 2MV implanter to give an 8 inch wafer capability; add a verifiable low dose capability for ion beam induced damage studies. Funding is being sort from other sources to also build a horizontal and vertical nanobeam to expand both ion beam analysis capabilities and exploit research at the biomedical interface.An added advantage of these developments will be to place the IBC in a position that it will be able to expand its research base from micro electronic materials into new areas including cultural heritage, biomedical applications, nanotechnology and geology and cosmology. In 4 years time we expect the IBC to be funded: One third from industry; one third from other funding bodies; one third from EPSRC. This will significantly reduce the amount of funding requested from EPSRC.Efficiency gains within the IBC will allow us to reduce the ticket price from 240 currently to 180 for this new grant period.