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LUBRICATION OF HIGH-SLIDING MICROMACHINES

高滑动微型机械的润滑

基本信息

批准号：
EP/D04099X/1
负责人：
Hugh Spikes
金额：
$ 42.61万
依托单位：
Imperial College London
依托单位国家：
英国
项目类别：
Research Grant
财政年份：
2006
资助国家：
英国
起止时间：
2006 至无数据
项目状态：
已结题

来源：
https://gtr.ukri.org/projects?ref=EP%2FD04099X%2F1
关键词：
LUBRICATION SLIDING MICROMACHINES

项目摘要

This project seeks to develop novel and effective ways of lubricating high-sliding MEMS. It is a collaboration between two research groups at Imperial College London, one specialising in MEMS and the other in tribology.One of the most important technological advances in the last 15 years has been the development of micro-electromechanical systems or MEMS. MEMS devices can be made cheaply and in very large numbers using silicon chip fabrication methods and they are now being used in a wide range of machines, from inkjet printers to motor cars. At present, one of the main factors that limits the use of MEMS is the friction and wear of the moving parts, since it turns out to be much more difficult to obtain low friction coefficients in micro-scale contacts than in macro-scale ones. This means that all of the MEMS devices currently in use are ones that require little or no sliding contact. However there is great interest in building micromachines with large amounts of sliding such as tiny gas turbine engines and generators. Such devices could be used to power mobile phones and other portable equipment such as survival gear, but the problem is how to lubricate them effectively.At present, most MEMS are either not lubricated at all or are lubricated by depositing a monolayer of organic molecules on their surfaces prior to use. However in high-sliding MEMS this layer is damaged and lost during sliding, resulting in high friction and wear. The applicants believe that successful lubrication of high-sliding MEMS will require some means of replenishing the lubricant film during prolonged MEMS operation. Therefore, in this project three novel ways of establishing a replenishing lubricant film in MEMS will be explored: vapour phase replenishment, the use of a thin, mobile liquid film and the operation of MEMS partially or wholly immersed in low viscosity liquid. This last possibility is the most controversial since it has generally been assumed up to now that the viscous drag forces created in an immersed MEMS device would be too large. However calculations by the applicants suggest that this should not be the case for some larger devices, in which case low viscosity lubricants containing additives may be an attractive option. If MEMS devices can be operated within a liquid environment then it makes possible not just lubrication by formation of a liquid film between rubbing parts - hydrodynamic lubrication - but also lubrication by additives dissolved in the liquid which adsorb and react with the rubbing surfaces - boundary lubrication.The project will first construct a MEMS tribometer in which friction can be monitored and wear measured using lubricated MEMS components. This instrument will then be used in conjunction with a second, millimeter-scale tribometer to test and develop the above three methods of lubricating MEMS.

该项目旨在开发新型有效的润滑高滑动MEMS的方法。这是伦敦帝国理工学院两个研究小组的合作，一个专门研究MEMS，另一个专门研究摩擦学。过去15年来最重要的技术进步之一是微机电系统（MEMS）的发展。使用硅芯片制造方法可以廉价地大量制造MEMS器件，并且它们现在被用于从喷墨打印机到电动汽车的各种机器中。目前，限制MEMS应用的主要因素之一是运动部件的摩擦和磨损，因为在微尺度接触中获得低摩擦系数比在宏观尺度接触中困难得多。这意味着目前使用的所有MEMS器件都是需要很少或不需要滑动接触的器件。然而，人们对制造具有大量滑动的微型机械如微型燃气涡轮机发动机和发电机有很大的兴趣。这类装置可用于为移动的手机和其他便携式设备（如救生装备）提供动力，但问题是如何有效地润滑它们。目前，大多数MEMS要么根本不润滑，要么在使用前通过在其表面沉积单层有机分子来润滑。然而，在高滑动MEMS中，该层在滑动期间被损坏和丢失，导致高摩擦和磨损。申请人相信，高滑动MEMS的成功润滑将需要在延长的MEMS操作期间补充润滑剂膜的一些手段。因此，在本项目中，将探索在MEMS中建立补充润滑剂膜的三种新方法：气相补充、使用薄的、移动的液体膜以及部分或全部浸没在低粘度液体中的MEMS的操作。最后一种可能性是最有争议的，因为到目前为止，人们通常认为浸没式MEMS器件中产生的粘性阻力太大。然而，申请人的计算表明，对于一些较大的装置不应该是这种情况，在这种情况下，含有添加剂的低粘度润滑剂可能是有吸引力的选择。如果MEMS器件能够在液体环境中运行，那么不仅可以通过在摩擦部件之间形成液膜进行润滑（流体动力润滑），还可以通过溶解在液体中的添加剂进行润滑，这些添加剂吸附并与摩擦表面发生反应（边界润滑）。该项目将首先构建MEMS摩擦计，在该摩擦计中可以使用润滑的MEMS部件监测摩擦并测量磨损。然后，该仪器将与第二个毫米级摩擦计结合使用，以测试和开发上述三种润滑MEMS的方法。