Semiconductor-based hybrid structures for ultraviolet micro-devices

用于紫外微型器件的半导体混合结构

• 批准号: EP/D078555/1
• 负责人: Martin David Dawson
• 金额: $ 92.95万
• 依托单位: University of Strathclyde
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2007
• 资助国家: 英国
• 起止时间: 2007 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FD078555%2F1
• 关键词: Semiconductor; based; hybrid; structures; ultraviolet

We aim to unite emerging elements of inorganic semiconductor materials science with novel areas of polymer physics and chemistry, to develop a new range of 'hybrid' optical structures and sources for the UV/violet region of the spectrum. This timely and ambitious programme builds upon our core expertise in optical physics, microfabrication and semiconductor materials science, and shapes and directs collaborations with leading teams - both in the UK and abroad - in associated disciplines. These include deep ultraviolet semiconductors, novel structural polymers, organic light-emitting devices, biomaterials, digital optical chemistry and quantum dot spectroscopy.The spectral region of interest in the current proposal, covering wavelengths from violet to around half that of blue light, is one of special significance for the interaction of light with matter. Many atomic and molecular transitions lie in this range, and, most importantly, so do the natural absorptions of many types of organic (carbon-containing) materials. Indeed, we can interpret the notion of organic materials broadly, to encompass both living and non-living materials. Examples of the former are polymers, resins and photoresists; examples of the latter are DNA and protein sequences, cells and tissues. For these reasons, UV/violet wavelengths are of central importance to a wide range of disciplines at the forefront of current science and technology, including micro- and nano-patterning of materials, bio- and chemical sensing, optical imaging and microscopy, and selective light-matter interactions. The topics to be addressed in the programme engage a wide range of areas including those above: We will develop micro-pixellated light-emitting diodes operating into the deep ultraviolet, taking to shorter wavelengths the approaches we have poineered in the blue/green and taking advantage of the remarkable recent developments in AlGaN light-emitting materials. In conjunction with our collaborators, we will develop and process novel polymeric materials to make custom photoresists and structural polymers for use with the above and other optical sources. This will provide a range of new optical polymers for use in areas such as encapsulation, micro-optics, mask-free and self-aligned photolithography. We will develop, with other collaborators, hybrid light-emitting polymer structures integrated with our devices and investigate novel forms of energy transfer between them. Furthermore, we will continue and our groundbreaking work on site-controlled GaN/InGaN quantum dots and seek to couple the light-emission from these to high-finesse optical microcavities. We will support the above by complementary investigations into other UV-compatible materials including ZnO and diamond where the team already has expertise and collaborations.Both the microstructured LED and dot/microcavity devices will be used to study the selective interaction of light with biomaterials. On the one hand, 'digital optical chemistry' synthesis of custom biosensor micro-arrays will be undertaken, using a variety of substrates including UV-transparent polymers, sapphire and diamond. On the other, coupling of quantum dots/microcavity emission to such as proteins and amino acids will be investigated.

我们的目标是将无机半导体材料科学的新兴元素与聚合物物理和化学的新领域结合起来，开发一系列新的“混合”光学结构和紫外/紫光光谱区域的光源。这个及时而雄心勃勃的计划建立在我们在光学物理，微加工和半导体材料科学的核心专业知识基础上，并与英国和国外的领先团队在相关学科中形成和指导合作。这些领域包括深紫外半导体、新型结构聚合物、有机发光器件、生物材料、数字光学化学和量子点光谱学。目前的提案中感兴趣的光谱区域涵盖了从紫光到蓝光波长的一半左右，对光与物质的相互作用具有特殊意义。许多原子和分子的跃迁都在这个范围内，最重要的是，许多类型的有机（含碳）材料的自然吸收也在这个范围内。事实上，我们可以广义地解释有机材料的概念，包括生物和非生物材料。前者的例子是聚合物、树脂和光致抗蚀剂;后者的例子是DNA和蛋白质序列、细胞和组织。由于这些原因，紫外线/紫光波长对于当前科学和技术前沿的广泛学科具有核心重要性，包括材料的微米和纳米图案化，生物和化学传感，光学成像和显微镜以及选择性光-物质相互作用。在该计划中要解决的主题涉及广泛的领域，包括上述：我们将开发微像素发光二极管工作到深紫外线，采取更短的波长的方法，我们已经poineered在蓝色/绿色和利用AlGaN发光材料的显着最近的发展优势。与我们的合作者一起，我们将开发和加工新型聚合物材料，以制造用于上述和其他光源的定制光致抗蚀剂和结构聚合物。这将提供一系列新的光学聚合物，用于封装、微光学、无掩模和自对准光刻等领域。我们将与其他合作者一起开发与我们的设备集成的混合发光聚合物结构，并研究它们之间能量转移的新形式。此外，我们将继续我们在位置控制GaN/InGaN量子点上的开创性工作，并寻求将这些量子点的光发射耦合到高精细光学微腔。我们将通过对其他紫外兼容材料的补充研究来支持上述工作，包括ZnO和金刚石，该团队已经拥有专业知识和合作。微结构LED和点/微腔器件都将用于研究光与生物材料的选择性相互作用。一方面，“数字光学化学”合成定制的生物传感器微阵列将进行，使用各种基板，包括紫外线透明聚合物，蓝宝石和金刚石。另一方面，将研究量子点/微腔发射与蛋白质和氨基酸等的耦合。

项目成果

New light from hybrid inorganic-organic emitters

• DOI: 10.1088/0022-3727/41/9/094006
• 发表时间: 2008-05-07
• 期刊: JOURNAL OF PHYSICS D-APPLIED PHYSICS
• 影响因子: 3.4
• 作者: Belton, C. R.;Itskos, G.;Bradley, D. D. C.
• 通讯作者: Bradley, D. D. C.

Patterning and integration of polyfluorene polymers on micro-pixellated UV AlInGaN light-emitting diodes

微像素化 UV AlInGaN 发光二极管上聚芴聚合物的图案化和集成

• DOI: 10.1088/0022-3727/41/9/094008
• 发表时间: 2008
• 期刊: Applied Physics
• 作者: Guilhabert B

Mask-less ultraviolet photolithography based on CMOS-driven micro-pixel light emitting diodes.

• DOI: 10.1364/oe.17.023522
• 发表时间: 2009-12
• 期刊: Optics express
• 影响因子: 3.8
• 作者: D. Elfström;B. Guilhabert;J. McKendry;S. Poland;Z. Gong;D. Massoubre;E. Richardson;B. Rae;G. Valentine;G. Blanco-Gomez;E. Gu;J. Cooper;R. Henderson;M. Dawson

Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma

使用氯感应耦合等离子体对金刚石进行蚀刻和微光学制造

• 作者: Chee-Leong Lee (Co-Author)

Direct LED writing of submicron resist patterns: Towards the fabrication of individually-addressable InGaN submicron stripe-shaped LED arrays

亚微米光刻胶图案的直接 LED 写入：面向制造可单独寻址的 InGaN 亚微米条形 LED 阵列

• DOI: 10.1007/s12274-014-0545-5
• 发表时间: 2014
• 期刊: Nano Research
• 影响因子: 9.9
• 作者: Gong Z