Upgrade of metal organic vapor phase epitaxy reactors for thermoelectric and magnetic semiconductor alloys and heterostructures

用于热电和磁性半导体合金和异质结构的金属有机气相外延反应器的升级

• 批准号: 345592-2007
• 负责人: Masut, Remo
• 金额: $ 10.05万
• 依托单位: École Polytechnique de Montréal
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2006
• 资助国家: 加拿大
• 起止时间: 2006-01-01 至 2007-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=326003
• 关键词: Upgrade; metal; organic; vapor; phase

This equipment proposal requests funds to complete the construction of a metal-organic vapor phase epitaxy reactor (MOVPE) for the growth of magnetic semiconductors alloys (MSA) and low dimensional thermoelectric (TE) structures at the Department of Engineering Physics of the Ecole Polytechnique of Montreal. It also requests funds to replace specialty valves to ensure the adequate operation of both this new and the existing MOVPE reactor which has now more than 17 years of use. For the MSA/TE reactor still under construction we need replacing of the "chemical" vacuum pump at the reactor core, and the electronic and computer control units of the fast switching gas manifold. This control is essential to provide sharp interfaces in device heterostructures. We also need flow meters, a binary concentration gas monitor, and new quartz ware and graphite susceptors.  This MSA/TE reactor, partially built from parts of an old Nortelnetworks reactor donated to our laboratories, has already produced the first GaMnP/GaP(001) films by this technique. The funds we request will help upgrade and complete this reactor by the addition of new organometallic lines, as well as providing essential equipment to continue adequate operation of both reactors at our facilities. These MOVPE systems are part of the central facilities of the Montreal Thin Films Group (GCM) and complement the expertise in materials science, semiconductor device design, fabrication and characterization of many of its members. The new reactor dedicated to MSA/TE, which needs to be completed, introduces magnetic elements such as Mn, or column VI elements, which are contaminants highly incompatible with the projects carried out in the older reactor. Both systems are at the core of a broad program in III-V semiconductor crystal growth for projects on: (1) epitaxy of MSA for fundamental studies on transport in magnetic and semiconducting heterostructures, (2) fundamental studies of materials properties, in particular those which are affected by strain and strain-relaxation, including dilute nitrides and reduced dimensionality structures such as quantum dots and (3) novel electronic, optoelectronic, and thermoelectric device development.

该设备提案要求资金用于在蒙特利尔理工学院工程物理系完成金属有机气相外延反应器（MOVPE）的建设，用于磁性半导体合金（MSA）和低维热电（TE）结构的生长。它还要求资金更换专用阀门，以确保这一新的和现有的MOVPE反应堆都能充分运行，该反应堆目前已使用了17年以上。对于仍在建造中的MSA/TE反应堆，我们需要更换反应堆堆芯的“化学”真空泵，以及快速开关气体歧管的电子和计算机控制单元。这种控制对于在器件异质结构中提供清晰的接口是必不可少的。我们还需要流量计，二元气体浓度监测器，以及新的石英器和石墨感受器。这个MSA/TE反应器，部分是由北电网络公司捐赠给我们实验室的旧反应器的部分部件建造的，已经用这种技术生产了第一个GaMnP/GaP（001）薄膜。我们要求的资金将通过增加新的有机金属生产线来帮助升级和完成这个反应堆，并提供必要的设备，以继续在我们的设施中充分运行两个反应堆。这些MOVPE系统是蒙特利尔薄膜集团（GCM）中心设施的一部分，并补充了其许多成员在材料科学，半导体器件设计，制造和表征方面的专业知识。需要完成的MSA/TE专用新反应器引入磁性元素，如Mn或VI柱元素，这些污染物与旧反应器中进行的项目高度不相容。这两个系统都是III-V半导体晶体生长项目的核心：(1)MSA外延，用于磁性和半导体异质结构输运的基础研究；(2)材料性质的基础研究，特别是受应变和应变松弛影响的材料，包括稀氮化物和降维结构，如量子点；(3)新型电子、光电和热电器件的开发。