MEMS sensors for harsh environments

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Development of Micro Electro Mechanical Systems (MEMS) tailored to harsh environment applications is a new and emerging area of research. The objective of the proposed research program is to develop new multifunctional MEMS sensors capable of operation in high temperature environments. To achieve this objective, the design and characterization of next generation sensors, appropriate fabrication methods, on-chip integration, and sensor packaging will be investigated.     Many applications that require MEMS sensors take place in harsh environments - locations with high temperature, high radiation and intense vibration, to name a few. For example, in the automotive industry, to prevent rollover accidents linked to under-inflation of tires, small and robust multiple sensing units are needed to provide active tire-monitoring under high temperature and intense vibrations. In space exploration, small, simple and reliable sensor systems that do not need to reside in environmentally controlled areas will reduce the size and weight of satellites and rovers. Hence, robust and cost effective single-chip MEMS sensors that can reliably operate in harsh environments will replace the bulky and expensive sensor systems in use today.     The proposed new multifunctional MEMS sensors will be fabricated on a single chip using materials that exhibit good mechanical and thermal stability at elevated temperatures, such as Silicon and/or Silicon Carbide (SiC) for the substrates, and Silicon Nitride and/or SiC thin films for the sensing elements. The chip will be packaged using a micro-capsule which will provide extra protection and result in further reduction in the size and overall weight of the sensor system. This project will lead to innovative concepts for multiple sensing and the development of new and/or better fabrication techniques for MEMS sensors tailored to harsh environments. It will also lead to breakthroughs in sensor reliability and lifetime, issues that are currently limiting the commercial use of MEMS sensors in general. Students who graduate from this program will have extensive hands-on experience in the development of MEMS and will be in great demand now and the foreseeable future.