Focused ion beam tool for nanometer-scale fabrication and characterization

皇后大学的研究人员建议购买一种聚焦离子束工具(FIB)，在安大略省金斯敦安装和操作。该工具加速并将高真空中的一束镓离子聚焦到直径几纳米的一个点上，具有两种一般效应：当离子从样品中溅射出物质时，将三维受控图案蚀刻到许多不同的材料中；以及离子与样品的相互作用导致二次电子和X射线的发射，从而能够对材料进行表征。例如，通过向腔体中添加特定气体，材料可以与光束一起沉积，或加速蚀刻。FIB是唯一一种可以在多种材料上制造出几个纳米尺度的三维结构的工具，在许多不同的学科中具有巨大的潜力。目前，大多数FIB应用涉及集成电路“手术”和用于透射电子显微镜的样品制备。在专门为工业提供FIB服务的加拿大公司Fibics Inc.的技术和培训支持下，提交此建议书的团队将推动真正的创新工作：使用FIB探索微小晶体结构的机械性能；使用新制造的纳米级设备测试测量极限；集成微米级和纳米级设备；以及评估纳米纤维的3D结构，以更好地了解固/液界面。在拟议团队的监督下探索如此多样化的问题，将使众多研究生能够在尖端技术方面进行全面培训，为他们在政府和私营部门进行高级研究和就业做好准备。

Researchers at Queen's University propose to purchase a focused ion beam tool (FIB) to be installed and operated in Kingston, Ontario.  This tool accelerates and focuses a beam of gallium ions in high vacuum onto a spot a few nanometers in diameter, with two general effects:  the ions sputter away material from the sample, etching controlled patterns in three dimensions into many different materials; and  the ion interaction with the sample causes emission of secondary electrons and x-rays, enabling characterization of the material.  By adding specific gases to the chamber, material can be deposited with the beam, or etching accelerated. The FIB is the only tool that can fabricate three-dimensional structures at the few nanometer scale in a variety of materials, and holds great potential in a number of different disciplines. Currently most FIB applications involve integrated circuit "surgery" and sample preparation for transmission electron microscopy. In conjunction with technical and training support from Fibics Inc., a Canadian company specializing in FIB services for industry, the team submitting this proposal will push into truly innovative work: using the FIB to explore the mechanical properties of tiny crystalline structures; test the limits of measurement with newly fabricated nanoscale devices; integrate micro and nanoscale devices; and evaluate the 3D structure of nano-fibers to better understand solid/liquid interfaces. Exploring such diverse questions under the supervision of the proposed team will enable numerous graduate students full training in cutting edge technology, preparing them for advanced research and employment in the government and private sectors.