Focused ion beam tool for nanometer-scale fabrication and characterization

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Researchers at Queen's University propose to purchase a focused ion beam tool (FIB) to be installed and operated in Kingston, Ontario.  This tool accelerates and focuses a beam of gallium ions in high vacuum onto a spot a few nanometers in diameter, with two general effects:  the ions sputter away material from the sample, etching controlled patterns in three dimensions into many different materials; and  the ion interaction with the sample causes emission of secondary electrons and x-rays, enabling characterization of the material.  By adding specific gases to the chamber, material can be deposited with the beam, or etching accelerated. The FIB is the only tool that can fabricate three-dimensional structures at the few nanometer scale in a variety of materials, and holds great potential in a number of different disciplines. Currently most FIB applications involve integrated circuit "surgery" and sample preparation for transmission electron microscopy. In conjunction with technical and training support from Fibics Inc., a Canadian company specializing in FIB services for industry, the team submitting this proposal will push into truly innovative work: using the FIB to explore the mechanical properties of tiny crystalline structures; test the limits of measurement with newly fabricated nanoscale devices; integrate micro and nanoscale devices; and evaluate the 3D structure of nano-fibers to better understand solid/liquid interfaces. Exploring such diverse questions under the supervision of the proposed team will enable numerous graduate students full training in cutting edge technology, preparing them for advanced research and employment in the government and private sectors.