Nonlinear control of electrostatic MEMS with applications to optical systems

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This program will apply advanced nonlinear control techniques to the area of microelectromechanical systems (MEMS) in order to provide enhanced functionality and performance for MEMS applications. Many issues raised in the present program have not yet been addressed in MEMS literature, and there are no trivial solutions to these problems. On the other hand, MEMS exhibit rich and complex properties, providing challenging and attractive subjects from the perspective of control techniques. Hence, the proposed research will not only revolutionize the roles MEMS will play in future applications, but also lead to new classes of generic nonlinear control problems. The achievement of this program will then help fill the gap between these two areas.    This program aims firstly at building a solid theoretical basis for MEMS control system analysis and design while taking into account the realistic operational conditions for real-life systems. A particular attention will be paid to algorithms allowing avoiding the singularity related to the uncontrollability and to those being able to guarantee the stability of switched systems. Diverse physical properties and constraints of micro-devices will also be incorporate into MEMS control system design. Control schemes with new sensing mechanisms will be developed to make MEMS less costly, much easier to implement, and more reliable. The research work will then focus on the control of interconnected MEMS array using techniques of decentralized control of spatially distributed systems. CoventorWare and COMSOL will be used to simulate MEMS devices and an interactive simulation environment containing COMSOL and MATLAB will be built. Hardware-in-the-loop simulations and real-time experimental implementations will also be used for control system verification and validation.    The ultimate goal of this program is to build experimental demonstration of key components of an eye aberration diagnostic and correction system for enhanced adaptive optics (AO) systems. Due to the complexity and sophistication of a complete AO system and its various subsystems, the proposed research will represent a significant step forward putting us in a leading position in this area.