Nonlinear control of electrostatic MEMS with applications to optical systems

静电 MEMS 的非线性控制及其在光学系统中的应用

• 批准号: 312116-2007
• 负责人: Zhu, Guchuan
• 金额: $ 1.51万
• 依托单位: École Polytechnique de Montréal
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2009
• 资助国家: 加拿大
• 起止时间: 2009-01-01 至 2010-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=428057
• 关键词: Nonlinear; control; electrostatic; MEMS; applications

This program will apply advanced nonlinear control techniques to the area of microelectromechanical systems (MEMS) in order to provide enhanced functionality and performance for MEMS applications. Many issues raised in the present program have not yet been addressed in MEMS literature, and there are no trivial solutions to these problems. On the other hand, MEMS exhibit rich and complex properties, providing challenging and attractive subjects from the perspective of control techniques. Hence, the proposed research will not only revolutionize the roles MEMS will play in future applications, but also lead to new classes of generic nonlinear control problems. The achievement of this program will then help fill the gap between these two areas.

该计划将先进的非线性控制技术应用于微机电系统（MEMS）领域，以便为MEMS应用提供增强的功能和性能。在本计划中提出的许多问题尚未在MEMS文献中得到解决，并且没有琐碎的解决方案来解决这些问题。另一方面，MEMS表现出丰富而复杂的特性，从控制技术的角度提供了具有挑战性和吸引力的主题。因此，所提出的研究不仅将彻底改变MEMS在未来应用中的作用，而且还将导致新类型的一般非线性控制问题。这个项目的成功将有助于填补这两个领域之间的空白。