Fundamental and applications of low temperature plasmas

点击翻译按钮获取中文摘要

The driving motivation of my research program is related to the crucial needs for better understanding the physical and chemical phenomena involved in low temperature plasmas as required for optimizing their parameters in the context of specific applications, particularly in photonics and elemental analysis. In this context, for several years, I have been leading at the Université de Montreal a research program on the development, characterization and optimization of advanced plasma sources for applications to materials processing and analysis. This program relies on a deep understanding of plasma science and on an exhaustive know-how in plasma diagnostics and modeling, together with a strong interest for plasma applications. This research effort in both plasma science and materials processing and analysis applications has been extremely successful. I intend to build upon my previous successful work and continue to excel in plasma science and their applications. The impact of this research will be tremendously extended in Canada with the implementation of the "Laboratoire en Science et Applications des Plasmas" (LSAP) recently awarded by the CFI and Quebec government. The new instruments acquired in this context will allow to push my experimental capabilities to develop and implement innovative plasma diagnostics based on lasers, and pursue the investigation of advanced plasma sources for advanced materials etching, and materials and nanomaterials synthesis and analysis. In this context, my specific objectives for the next five years will be (i) pursue and develop the investigation of high-density plasma etching of advanced materials and process optimization for the fabrication of new photonic devices, (ii) pursue and develop the investigation of laser plasmas in the context of materials and nanomaterials synthesis and analysis and (iii) model and optimize the characteristics of microwave-induced plasmas for analytical applications. The new knowledge generated from this program and the training of highly qualified personnel will have a strong scientific impact and will stimulate the development of applications relevant for Canadian high-technology sectors.