RF and microwave plasmas intended for applications to nanometer pattern transfer and nanomaterials synthesis

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Low temperatures plasmas (i.e. with electron temperatures less than about 10 eV) are at the heart of a broad range of advanced processes crucial for applications in highly competitive sectors of economy. The understanding of the physical and chemical phenomena involved in such plasmas is absolutely required for optimizing their parameters in the context of specific applications. Such fundamental studies are the driving motivation of my research program. In this context, for several years, I have been leading at Université de Montreal a research program on the development, characterization and optimization of advanced plasma sources for applications to materials processing and analysis. This program relies on a deep understanding of plasma science and on an exhaustive know-how in plasma diagnostics and modeling, together with a strong interest for plasma applications. This research effort in both plasma science and materials processing and analysis applications has been extremely successful. Over the next years, I intend to continue to build upon this expertise to innovate in plasma science and its applications along the following lines: (i) pursue the investigation of high-density plasmas for optimized pattern transfer into advanced materials, with a specific focus on CBN, an electro-optical material with potential impact in photonics, and on chromium, used in the fabrication of templates for nanoimprint lithography; (ii) develop and characterize low-pressure magnetically confined dusty plasmas with a specific focus on the influence of the magnetic field on nanoparticles formation and transport; and (iii) investigate and optimize radiofrequency atmospheric pressure plasmas in the context of wood processing. The new scientific knowledge generated from this program together with the resulting training of highly qualified personnel will impact the field of low temperature plasmas and will stimulate the development of applications relevant for Canadian traditional and high-technology industries.