Excimer laser for plasma generation and applications

所要求的设备是准分子激光器，将支持我的研究计划的许多方面，即脉冲沉积，激光诱导等离子体光谱学和诊断高密度等离子体的纳米图案的先进光子材料。我的研究计划的驱动动机与更好地理解低温等离子体中所涉及的物理和化学现象的关键需求有关，这些现象是在特定应用背景下优化其参数所必需的。在此背景下，多年来，我一直在蒙特利尔大学领导一个研究项目，研究用于材料加工和分析的先进等离子体源的开发、表征和优化。该计划依赖于对等离子体科学的深刻理解和对等离子体诊断和建模的详尽知识，以及对等离子体应用的浓厚兴趣。我打算建立在我以前的成功工作，并继续在等离子体科学及其应用中脱颖而出。一个重要的努力最近也致力于整合该计划的各个互补方面，以开发光子器件的先进材料工艺。在我打算探讨的各个方面中，让我们注意以下关键问题：（i）开发和实施基于激光的创新等离子体诊断，（ii）追求和发展先进材料的高密度等离子体蚀刻的研究和新光子器件制造的工艺优化，以及（iii）在材料和纳米材料合成和分析的背景下，开展和发展激光等离子体的研究。该设备将取代1994年购置的准分子激光器，该激光器在几个月前发生重大故障，导致研究严重延误。

The equipment requested is an excimer laser that will support many aspects of my research program, namely pulsed deposition, laser-induced plasma spectroscopy and diagnostics of high-density plasmas for nanometer patterning of advanced photonic materials. The driving motivation of my research program is related to the crucial needs for better understanding the physical and chemical phenomena involved in low temperature plasmas as required for optimizing their parameters in the context of specific applications. In this context, for several years, I have been leading at the Université de Montréal a research program on the development, characterization and optimization of advanced plasma sources for applications to materials processing and analysis. This program relies on a deep understanding of plasma science and on an exhaustive know-how in plasma diagnostics and modeling, together with a strong interest for plasma applications. I intend to build upon my previous successful work and continue to excel in plasma science and their applications. An important effort has been also recently devoted to integrate the various complementary aspects of the program to develop advanced materials processes for photonic devices. Among the aspects that I intend to pursue, let us note the following key issues : (i) develop and implement innovative plasma diagnostics based on lasers, (ii) pursue and develop the investigation of high-density plasma etching of advanced materials and process optimization for the fabrication of new photonic devices, and (iii) pursue and develop the investigation of laser plasmas in the context of materials and nanomaterials synthesis and analysis. The equipment will replace an excimer laser acquired in 1994 and that suffered from a major failure a few months ago, resulting in a severe research delay.