Micro system analyzer (MSA) for vibration testing of micro structures

用于微结构振动测试的微系统分析仪 (MSA)

• 批准号: 458757-2014
• 负责人: Amabili, Marco
• 金额: $ 10.73万
• 依托单位: McGill University
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2013
• 资助国家: 加拿大
• 起止时间: 2013-01-01 至 2014-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=542025
• 关键词: Micro; system; analyzer; MSA; vibration

The requested equipment supports the following research activities of five research groups at the faculty of Engineering of McGill University and École Polytechnique de Montréal: 1) Nonlinear behavior of micro-electromechanical systems (MEMS); 2) Static and dynamic displacements of microstructures in testing of MEMS devices; 3) Nonsmooth modal analysis; 4) Advanced biosensing techniques; and 5) Reducing the fluid damping induced on the microcantilevers used in scanning probe microscopes. All of these research groups share the need for an all-in-one Micro System Analyzer (MSA) to further develop their research.

所要求的设备支持麦吉尔大学和蒙特利尔理工学院工程系五个研究小组的以下研究活动：1）微机电系统的非线性行为; 2）微机电系统装置测试中微结构的静态和动态位移; 3）非光滑模态分析; 4）先进生物传感技术;和5）减小在用于扫描探针显微镜的微悬臂梁上引起的流体阻尼。所有这些研究小组都需要一体化的微系统分析仪（MSA）来进一步发展他们的研究。