A new MEMS gyroscope design based on nonlinear coupling and internal resonance

基于非线性耦合和内谐振的新型MEMS陀螺仪设计

• 批准号: 447285-2013
• 负责人: Golnaraghi, Farid
• 金额: $ 9.46万
• 依托单位: Simon Fraser University
• 依托单位国家: 加拿大
• 项目类别: Strategic Projects - Group
• 财政年份: 2014
• 资助国家: 加拿大
• 起止时间: 2014-01-01 至 2015-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=554529
• 关键词: new; MEMS; gyroscope; design; based

Micro-gyroscopes are the next major sensory application of the MEMS (Micro Electro Mechanical System) technology after the successful commercialization of pressure sensors and accelerometers. The market value of MEMS gyros is expected to be in excess of $1.57B in 2017. These sensors employ a vibrating mass to detect angular rate through coupling of vibration modes of a structure. However, MEMS gyros often suffer from limited resolution and long-term drift. This is partly due to the small signals produced by these devices and manufacturing non-idealities.

微陀螺仪是继压力传感器和加速度计成功商业化之后，MEMS（微机电系统）技术的下一个主要传感应用。MEMS陀螺仪的市场价值预计在2017年将超过15.7亿美元。这些传感器利用振动质量通过结构振动模式的耦合来检测角速度。然而，MEMS陀螺仪经常受到有限的分辨率和长期漂移的影响。这部分是由于这些设备产生的小信号和制造的非理想性。