A MEMS ultrasonic probe for medical diagnostic imaging applications

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The objective of the proposed research is to develop a high performance Microelectromechanical systems (MEMS) based ultrasonic probe for 2-D and 3-D anatomical and functional medical diagnostic imaging using recently patented advances made in Capacitive Micromachined Ultrasonic Transducer (CMUT) technology at the University of Windsor (UW). This new technology is based on a patented, "Cyclotene® based wafer bonding and sealed cavity formation", technique developed by the applicant at the University of Windsor. This new technique enables one to fabricate highly compact, low cost CMUT arrays with better transduction efficiency and has been licensed for automotive applications to MIS Electronics, a Toronto based company. The aim of the proposed project is to exploit the capabilities of this new technique to realize a CMUT based ultrasonic probe that can be used with standard medical diagnostic imaging equipment to produce brighter and higher resolution images as compared to conventional piezoelectric based ultrasonic scanners. The target probe will also have the potential to be configured or fabricated to offer continuous wave (CW) high pressure focused ultrasound (HIFU) for use in therapeutic applications, such as cancerous cell ablation. The global research trend is to switch from piezoelectric ultrasonic transducers to CMUTs for medical imaging and therapeutic applications for improved diagnostic image quality, faster healing, and less invasive treatment at a lower cost and also to offer ultrasound based new healthcare technologies. The goal of this project is to align this newly developed Canadian CMUT technology with the global trend to exploit the underlying commercial and better healthcare benefit. Successful commercialization of this proprietary leading edge technology will benefit Canada in terms of new manufacturing facilities, creating revenues, new job opportunities and exports. Canada's own healthcare system would also benefit from the outcome of this project as these better performing and lower cost systems would enable more accurate diagnosis and therapy.