High Performance CMUT Arrays

高性能 CMUT 阵列

• 批准号: RGPIN-2017-04574
• 负责人: Chowdhury, Sazzadur
• 金额: $ 1.75万
• 依托单位: University of Windsor
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2019
• 资助国家: 加拿大
• 起止时间: 2019-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=679763
• 关键词: Performance; CMUT; Arrays

The proposed research will investigate current barriers that limit the full potential of capacitive micromachined ultrasonic transducers (CMUT) for use in commercial, medical, and industrial applications. Specifically, issues related to high efficiency ultrasound generation and detection, such as resonance frequency drift, electrical and acoustical crosstalk between the elements of a CMUT array, sensitivity, nonlinear dielectric charging, leakage current, and transducer insulation necessary for efficient moisture protection and patient isolation will be investigated. ***The investigation will include theoretical analysis, 3D simulation, statistical analysis, virtual prototyping, fabrication, and experimental methods to acquire, model, and validate new scientific knowledge that can be used to design high performance CMUT arrays. The research will advance the CMUT technology to be a powerful alternative to commercially available piezoelectric transducers for biomedical imaging and therapy, non-destructive testing, and automotive applications. ***This advanced technology will support the development and commercialization of many new and/or improved products along with the associated employment opportunities. The research will especially lead to the development of highly integrated transducers for new biomedical imaging modalities with higher performance that will be the technology of choice in future ultrasonic imaging systems utilizing catheter ultrasonic probes. It is expected that this will lead to the earlier and faster diagnosis of medical conditions when they are more readily curable and less costly to treat. Highly qualified personnel (Master's and Ph.D.) in the fields of microsystems, MEMS-based ultrasonic transducer design, simulation, fabrication, packaging, testing, data acquisition and software development will be trained during the project period. These skills are readily transferable to many other types of computer assisted design projects in a number of sectors important to Canada. Research results flowing from this methodology will be published in peer-reviewed high impact factor journals and international and national conferences. Any new intellectual property will be secured by patent filings through the university. This advancement and diffusion of knowledge will lead to the generation of intellectual property, paths to commercialization that can enhance the global competitiveness of Canadian firms, and provide enhanced ultrasound based health care to Canadians.

拟议的研究将调查限制电容式微机械超声换能器（CMUT）在商业、医疗和工业应用中充分发挥潜力的当前障碍。具体来说，与高效超声产生和检测相关的问题，如共振频率漂移、CMUT阵列元件之间的电气和声学串扰、灵敏度、非线性介电电荷、泄漏电流以及有效防潮和患者隔离所需的换能器绝缘，将被研究。该研究将包括理论分析、3D模拟、统计分析、虚拟样机、制造和实验方法，以获取、建模和验证可用于设计高性能CMUT阵列的新科学知识。该研究将推动CMUT技术成为商用压电换能器的强大替代品，用于生物医学成像和治疗、无损检测和汽车应用。这项先进技术将支持许多新产品和/或改进产品的开发和商业化，并提供相关的就业机会。这项研究将特别导致高度集成换能器的发展，用于新的生物医学成像模式，具有更高的性能，这将是未来使用导管超声探头的超声成像系统的首选技术。预计这将导致更早和更快地诊断疾病，使其更容易治愈，治疗费用更低。项目期间将培养微系统、mems超声换能器设计、仿真、制造、封装、测试、数据采集和软件开发等领域的高素质人才（硕士和博士）。这些技能很容易转移到许多其他类型的计算机辅助设计项目在一些部门对加拿大很重要。这种方法产生的研究结果将发表在同行评议的高影响因子期刊以及国际和国家会议上。任何新的知识产权都将通过大学申请专利来保护。这种知识的进步和传播将导致知识产权的产生，以及能够提高加拿大公司全球竞争力的商业化途径，并为加拿大人提供更好的超声波医疗保健。